On the mechanisms in thermally actuated composite diaphragms

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 13-17

  Puers, Robert ^a   Cozma, Adriana ^a   De Bruyker, Dirk ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Composite diaphragms; Thermal actuation

Indexed keywords

ALUMINUM; BIMETALS; SENSORS; SILICON; TEMPERATURE CONTROL;

COMPOSITE DIAPHRAGMS; THERMAL ACTUATION;

THERMAL VARIABLES MEASUREMENT;

EID: 0041783316     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01721-4     Document Type: Article

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