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Volumn 332, Issue 1-2, 1998, Pages 113-117
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On the hardness of a-C:H films prepared by methane plasma decomposition
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Author keywords
Diamond like films; Hardness; Stress; Subimplantation model
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Indexed keywords
CARBON;
CHEMICAL BONDS;
ELECTRIC POTENTIAL;
FILM PREPARATION;
HARDNESS;
METHANE;
PLASMA APPLICATIONS;
PYROLYSIS;
RAMAN SPECTROSCOPY;
RIGIDITY;
SPUTTER DEPOSITION;
STRESS ANALYSIS;
DIAMOND LIKE CARBON (DLC) FILMS;
OPTICAL TRANSMISSION SPECTROSCOPY;
PLASMA DECOMPOSITION;
AMORPHOUS FILMS;
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EID: 0032476354
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)01026-8 Document Type: Article |
Times cited : (38)
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References (17)
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