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Volumn 332, Issue 1-2, 1998, Pages 113-117

On the hardness of a-C:H films prepared by methane plasma decomposition

Author keywords

Diamond like films; Hardness; Stress; Subimplantation model

Indexed keywords

CARBON; CHEMICAL BONDS; ELECTRIC POTENTIAL; FILM PREPARATION; HARDNESS; METHANE; PLASMA APPLICATIONS; PYROLYSIS; RAMAN SPECTROSCOPY; RIGIDITY; SPUTTER DEPOSITION; STRESS ANALYSIS;

EID: 0032476354     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01026-8     Document Type: Article
Times cited : (38)

References (17)
  • 5
    • 0003696779 scopus 로고
    • G. Hass, R.E. Thun (Eds.), Academic Press, New York
    • R.W. Hoffman, in: G. Hass, R.E. Thun (Eds.), Physics of Thin Films, Academic Press, New York, 1966.
    • (1966) Physics of Thin Films
    • Hoffman, R.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.