Preparation of highly transparent and conducting Ga2O3-In2O3 films by direct current magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 958-962

  Minami, T ^a   Takeda, Y ^a   Kakumu, T ^a   Takata, S ^a   Fukuda, I ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001765722     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580787     Document Type: Article

References (19)

1. H. Enoki, T. Nakayama, and J. Echigoya. Phys. Status Solidi A 129, 181 (1992).
2. H. Un'no, N. Hikuma, T. Omata, N. Ueda, T. Hashimoto, and H. Kawazoe, Jpn. J. Appl. Phys. 32, L1260 (1993).
3. T. Minami, H. Sonohara, S. Takata, and H. Sato, Jpn. J. Appl. Phys. 33, L1693 (1994).
4. J. M. Philips, J. Kwo, G. A. Thomas, S. A. Carter, R. J. Cava, S. Y. Hou, J. J. Krajewski, J. H. Marshall, W. F. Peck, D. H. Rapkine, and R. B. van Dover, Appl. Phys. Lett. 65, 115 (1994).
5. K. Yanagawa, Y. Ohki, T. Omata, H. Hosono, N. Ueda, and H. Kawazoe, Appl. Phys. Lett. 65, 406 (1994).
6. T. Minami, H. Sonohara, T. Kakumu, and S. Takata, Jpn. J. Appl. Phys. 34, L971 (1995).
7. T. Minami, S. Takata, H. Sato, and H. Sonohara, J. Vac. Sci. Technol. A 13, 1095 (1995).
8. T. Minami, S. Takata, T. Kakumu, and H. Sonohara, Thin Solid Films 270, 22 (1995).
9. T. Minami, T. Kakumu, and S. Takata, J. Vac. Sci. Technol. A 14, 1689 (1996).
10. T. Minami, T. Kakumu, and S. Takata, J. Vac. Sci. Technol. A 14, 1704 (1996).
11. ASTM X-ray Powder Diffraction File, Inorganic, No. 21-333.
12. ASTM X-ray Powder Diffraction File, Inorganic, No. 21-334.
13. ASTM X-ray Powder Diffraction File, Inorganic, No. 14-564.
14. T. Minami, H. Sato, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 24, L781 (1985).
15. J. B. Webb, Thin Solid Films 136, 135 (1986).
16. T. Minami, H. Nanto, H. Sato, and S. Takata, Thin Solid Films 164, 275 (1988).
17. S. Ishibashi, Y. Higuchi, Y. Ota, and K. Nakanura, J. Vac. Sci. Technol. A 8, 1403 (1990).
18. T. Minami, H. Sato, H. Imamoto, and S. Takata, Jpn. J. Appl. Phys. 31, L257 (1992).
19. T. Minami, H. Sonohara, T. Kakumu, and S. Takata, Thin Solid Films 270, 37 (1995).