Metal-organic chemical vapor deposition routes to films of transparent conducting oxides

Materials Research Society Symposium - Proceedings

Volumn 495, Issue , 1998, Pages 3-10

  Wang, A ^a   Cheng, S C ^a   Belot, J A ^a   McNeely, R J ^a   Cheng, J ^a   Marcordes, B ^a   Marks, T J ^a   Dai, J Y ^a   Chang, R P H ^a   Schindler, J L ^a   Chudzik, M P ^a   Kannewurf, C R ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; TRANSPARENCY;

GALLIUM INDIUM OXIDES; ZINC INDIUM OXIDES;

SEMICONDUCTING FILMS;

EID: 0031631621     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)