Deposition mechanisms and properties of oxygenated carbon nitride films from rf discharges of acetylene, nitrogen, oxygen and argon mixtures

Journal of Non-Crystalline Solids

Volumn 262, Issue 1, 2000, Pages 216-227

  Wang, Jianjun ^a   Durrant, Steven F ^a   de Moraes, Mário A B ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ARGON; CARBON INORGANIC COMPOUNDS; DEPOSITION; EMISSION SPECTROSCOPY; INFRARED SPECTROSCOPY; NITRIDES; NITROGEN; OXYGEN; PARAMAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX;

ACTINOMETRIC OPTICAL EMISSION SPECTROSCOPY; CARBON NITRIDE; INFRARED REFLECTION SPECTROSCOPY; REFLECTION ULTRAVIOLET-VISIBLE SPECTROSCOPY;

OPTICAL FILMS;

EID: 0033906905     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00663-8     Document Type: Article

References (39)

1. H. Yasuda, Plasma Polymerization, Academic Press, New York, 1985.
2. K. Ebihara, T. Fujishima, D. Kojyo, M. Murata, Plasma Sources Sci. Technol. 2 (1993) 14.
3. E.B. Priestley, P.J. Call, Thin Solid Films 69 (1980) 39.
4. W.G. Lee, S.Y. Woo, J.C. Kim, S.H. Choi, K.H. Oh, Thin Solid Films 237 (1994) 105.
5. H.J. Frenk, W. Kulisch, M. Kuhr, R. Kassing, Thin Solid Films 201 (1991) 327.
6. S. Kumar, P.N. Dixit, D. Sarangi, R. Bhattacharyya, Appl. Phys. Lett. 69 (1996) 49.
7. S. Logothetidis, H. Lefakis, M. Gioti, Carbon 36 (1998) 757.
8. C. Niu, T.A. Lu, C.M. Lieber, Science 261 (1993) 334.
9. Y. Chen, L. Guo, E.G. Wang, J. Cryst. Growth 179 (1997) 515.
10. M. Kohzaki, A. Matsumuro, T. Hayashi, M. Muramatsu, K. Yamaguchi, Thin Solid Films 308 (1997) 239.
11. A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
12. A.Y. Liu, M.L. Cohen, Phys. Rev. B 41 (1990) 10727.
13. Z.H. Zhang, H.X. Guo, X.Q. Meng, M.S. Ye, W. Zhang, X.J. Fan, Chinese Phys. Lett. 15 (1998) 913.
14. C.A. Fox, M.C. McMaster, W.L. Hsu, M.A. Kelly, S.B. Hagstrom, Appl. Phys. Lett. 67 (1995) 2379.
15. T. Vandevelde, M. Nesladek, C. Quaeyhaegens, L. Stals, Thin Solid Films 308 (1997) 154.
16. Y. Liou, A. Inspektor, R. Weimer, D. Knight, R. Messier, J. Mater. Res. 5 (1990) 2305.
17. J. Hu, P. Yang, C.M. Lieber, Phys. Rev. B 57 (1998) R3185.
18. H. Yokomichi, H. Sakima, A. Matsuda, Jpn. J. Appl. Phys. 37 (1998) 4722.
19. S.F. Durrant, N. Marçal, S.G. Castro, R.C.G. Vinhas, M.A.B. de Moraes, J.H. Nicola, Thin Solid Films 259 (1995) 139.
20. J.W. Coburn, M. Chen, J. Appl. Phys. 51 (1980) 3134.
21. C. Summonte, Mater. Res. Soc. Symp. Proc., Mater. Res. Soc. 297 (1993) 395.
22. E.Q. Xie, Y.F. Jin, Z.G. Wang, D.Y. He, Nucl. Instrum. Meth. B 135 (1998) 224.
23. D. Wu, D. Fu, H. Guo, Z. Zhang, X. Meng, X. Fan, Phys. Rev. B 56 (1997) 4949.
24. S.F. Durrant, S.G. Castro, J.I. Cisneros, N.C. da Cruz, M.A.B. de Moraes, J. Vac. Sci. Technol. A 14 (1996) 118.
25. J. Tauc, in: F. Abelès (Ed.), Optical Properties of Solids, North-Holland, Amsterdam, 1972, ch. 5.
26. S.F. Durrant, R.T. de Oliveira, S.G.C. Castro, L.E. Bolívar-Marínez, D.S. Galv˜ao, M.A.B. de Moraes, J. Vac. Sci. Technol. A 15 (1997) 1334.
27. J.E. Wertz, J.R. Bolton, Electron Spin Resonance: Elementary Theory and Practical Applications, McGraw-Hill, New York, 1972, p. 12.
28. H. Yasuda, T. Hsu, J. Polym. Sci. 15 (1977) 81.
29. F.D. Egitto, V. Vukanovic, G.N. Taylor, in: R. d'Agostino (Ed.), Plasma Deposition, Treatment, and Etching of Polymers, Academic Press, New York, 1990, ch. 5.
30. H. Suzuki, Electronic Absorption Spectra and the Geometry of Organic Molecules, Academic Press, New York, 1967, p. 4.
31. M.J.S. Dewar, The Electronic Theory of Organic Chemistry, Oxford University, London, 1949, p. 297.
32. J.W. Cooper, Spectroscopic Techniques for Organic Chemists, Wiley, New York, 1980, p. 232.
33. F. Jansen, M. Machonkin, S. Kaplan, S. Hark, J. Vac. Sci. Technol. A 3 (1985) 605.
34. D. Dasgupta, F. Demichelis, C.F. Pirri, A. Tagliaferro, Phys. Rev. B 43 (1991) 2131.
35. E.H. Lee, in: K. Mittal, M. Ghosh (Eds.), Polyimides: Fundamental Aspects and Technical Applications, Marcel Dekker, New York, 1996, ch. 17.
36. H. Yasuda, M.O. Bumgarner, H.C. Marsh, N. Morosoff, J. Polym. Sci. Polym. Chem. Ed. 14 (1976) 195.
37. S. Nitta, N. Takada, K. Sugiyama, T. Itoh, S. Nonomura, J. Non-Cryst. Solids 227 (1998) 655.
38. H. Yokomichi, H. Sakima, A. Masuda, Jpn. J. Appl. Phys. 37 (1998) 4722.
39. D.J. Miller, D.R. McKenzie, Thin Solid Films 108 (1983) 257.