Amorphous oxygen-containing hydrogenated carbon films formed by plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 118-124

  Durrant, Steven F ^a   Castro, Sandra G ^a   Cisneros, Jorge I ^a   Da Cruz, Nilson C ^a   Bica De Moraes, Mário A ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030538519     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579906     Document Type: Article

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