Early stages of deposition of nitrides on cubic silicon carbide: A theoretical study

Physica Status Solidi (A) Applied Research

Volumn 177, Issue 1, 2000, Pages 99-106

  Catellani, A ^a   Di Felice, R ^b  

^a CNR   (Italy)

^b UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CHEMICAL BONDS; DEPOSITION; FILM GROWTH; GAS ADSORPTION; INTERFACES (MATERIALS); MONOLAYERS; SILICON CARBIDE; THIN FILMS; WETTING;

ALUMINUM NITRIDE;

NITRIDES;

EID: 0033895898     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(200001)177:1<99::AID-PSSA99>3.0.CO;2-A     Document Type: Article

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