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Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 71, Issue , 2000, Pages 6-13

Defects in epitaxial SiGe-alloy layers

(1) Larsen, Arne Nylandsted a

a AARHUS UNIVERSITY (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON WAFERS; STRAIN; STRESS RELAXATION; THERMODYNAMIC STABILITY;

SILICON GERMANIDE; THREADING DISLOCATIONS;

SEMICONDUCTING FILMS;

EID: 0033887858 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(99)00341-4 Document Type: Article

Times cited : (5)

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