MeV ion implantation induced damage in relaxed Si1-xGex

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2208-2218

  Nylandsted Larsen, A ^a   O'Raifeartaigh, C ^b   Barklie, R C ^b   Holm, B ^b   Priolo, F ^c   Franzo, G ^d   Lulli, G ^e   Bianconi, M ^e   Nipoti, R ^e   Lindner, J K N ^f   Mesli, A ^g   Grob, J J ^g   Cristiano, F ^h   Hemment, P L F ^h  

^a AARHUS UNIVERSITY   (Denmark)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c UNIVERSITY OF CATANIA   (Italy)

^d CNR IMETEM   (Italy)

^e CNR   (Italy)

^f UNIVERSITY OF AUGSBURG   (Germany)

^g Faculté de Médecine   (France)

^h UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006782675     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364288     Document Type: Article

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