Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 261-266

  Jackman, Rebecca J ^a,b   Brittain, Scott T ^a,c   Whitesides, George M ^a,d,e  

^a HARVARD UNIVERSITY   (United States)

^b MCGILL UNIVERSITY   (Canada)

^c UNIVERSITY OF ALABAMA   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electrochemical deposition; Fabrication; Microcontact printing; Three dimensional microstructures

Indexed keywords

ELECTRIC WELDING; ELECTRODEPOSITION; MICROSTRUCTURE; PRINTING; SUBSTRATES;

MICROCONTACT PRINTING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032095884     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679396     Document Type: Article

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