Real time characterization of non-ideal surfaces and thin film growth by advanced ellipsometric spectroscopies

Materials Research Society Symposium - Proceedings

Volumn 569, Issue , 1999, Pages 43-58

  Collins, R W ^a   Rovira, P I ^a   Ferlauto, A S ^a   Koh, Joohyun ^a   An, Ilsin ^b   Zapien, J A ^a   Messier, R ^a   Wronski, C R ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ELLIPSOMETRY; OPTICAL PROPERTIES; SEMICONDUCTING GLASS; SEMICONDUCTING TIN COMPOUNDS; SILICON SOLAR CELLS; SPECTROSCOPY; SURFACE ROUGHNESS; SURFACE STRUCTURE; THIN FILMS;

SPECTROSCOPIC ELLIPSOMETRY; TIN OXIDE FILM;

FILM GROWTH;

EID: 0033357794     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-569-43     Document Type: Conference Paper

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