Studies of a sheath structure in an rf discharge using experimental, analytical, and simulation approaches

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1510-1515

  Kim, Jung Bae ^a   Kawamura, Kiyonori ^a   Choi, Young Wook ^a   Bowden, Mark D ^a   Muraoka, Katsunori ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Dynamic rf sheath structure; Laser induced fluorescence (lif); Laser spectroscopy; Rf glow discharge; Sheath electric field

Indexed keywords

COMPUTER SIMULATION; FLUORESCENCE; GLOW DISCHARGES; HELIUM; LASER DIAGNOSTICS; SPECTROSCOPY;

LASER INDUCED FLUORESCENCE (LIF) SPECTROSCOPY; RADIO FREQUENCY DISCHARGES;

PLASMA SHEATHS;

EID: 0033204911     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799833     Document Type: Article

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