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Journal of Applied Physics

Volumn 66, Issue 10, 1989, Pages 4688-4695

Monitoring of radio-frequency glow-discharge plasma

(3) Mutsukura, Nobuki a Kobayashi, Kenji a MacHi, Yoshio a

a TOKYO DENKI UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549092132 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.343826 Document Type: Article

Times cited : (38)

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