Measurements of sheath electric fields in a high pressure helium radio frequency discharge

Applied Physics Letters

Volumn , Issue , 1995, Pages 1059-

  Bowden, M D ^a   Choi, Y W ^a   Muraoka, K ^a   Maeda, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

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EID: 36449003529     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.113573     Document Type: Article

References (9)