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Applied Physics Letters

Volumn 63, Issue 24, 1993, Pages 3282-3284

Electric-field measurements in 13.56 MHz helium discharges

(2) Greenberg, K E a Hebner, G A a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005754 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.110175 Document Type: Article

Times cited : (48)

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