Analysis of sheath electric fields in a radio-frequency discharge in helium

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 11 PART A, 1996, Pages

  Choi, Young Wook ^a   Bowden, Mark ^a   Muraoka, Katsunori ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Electric field; Helium discharge; Laser induced fluorescence; Radio frequency discharge; Sheaths

Indexed keywords

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; HELIUM;

HELIUM DISCHARGE; LASER-INDUCED FLUORESCENCE SPECTROSCOPY; RADIO FREQUENCY DISCHARGE; SHEATH ELECTRIC FIELDS;

ELECTRIC FIELDS;

EID: 0030284469     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1459     Document Type: Article

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