Measurements of the cathode sheath in a magnetron sputtering discharge using laser induced fluorescence

Journal of Applied Physics

Volumn 73, Issue 8, 1993, Pages 3664-3667

  Bowden, M D ^a   Nakamura, T ^a   Muraoka, K ^a   Yamagata, Y ^b   James, B W ^c   Maeda, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

^c UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005103907     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.352925     Document Type: Article

References (9)