-
2
-
-
0024131141
-
Analytical solution for capacitive RF sheath
-
Dec. see also, “Dynamics of a collisional, capacitive RF sheath, ” IEEE Trans. Plasma Sci. 17 338–341 Apr. 1989
-
M. A. Lieberman, “Analytical solution for capacitive RF sheath,” IEEE Trans. Plasma Sci. 16 638–644, Dec. 1988; see also, “Dynamics of a collisional, capacitive RF sheath,” IEEE Trans. Plasma Sci. 17, 338–341, Apr. 1989.
-
(1988)
IEEE Trans. Plasma Sci
, vol.16
, pp. 638-644
-
-
Lieberman, M.A.1
-
3
-
-
0008230535
-
Macroscopic modeling of radio-frequency plasma discharges
-
G. R. Misium, A. J. Lichtenberg, and M. A. Lieberman, “Macroscopic modeling of radio-frequency plasma discharges,” J. Vac. Sci. Technol A7 3 1007–1013, 1989.
-
(1989)
J. Vac. Sci. Technol
, vol.A7
, Issue.3
, pp. 1007-1013
-
-
Misium, G.R.1
Lichtenberg, A.J.2
Lieberman, M.A.3
-
4
-
-
0014761931
-
Application of RF discharges to sputtering
-
H. R. Koenig and L. I. Maissel, “Application of RF discharges to sputtering,” IBM J. Res. Dey. 14 168–171, 1970.
-
(1970)
IBM J. Res. Dey
, vol.14
, pp. 168-171
-
-
Koenig, H.R.1
Maissel, L.I.2
-
5
-
-
11644321945
-
Electrical properties of planar RF discharges for dry etching
-
A. J. van Roosmalen, W. G. M. van den Hoek, and H. Kalter, “Electrical properties of planar RF discharges for dry etching,” J. Appl Phys. 58 2 653–658, 1985.
-
(1985)
J. Appl Phys
, vol.58
, Issue.2
, pp. 653-658
-
-
Van Roosmalen, A.J.1
Van Den Hoek, W.G.M.2
Kalter, H.3
-
6
-
-
0022706010
-
A continuum model of dc and RF discharges
-
D. B. Graves and K. F. Jensen, “A continuum model of dc and RF discharges,” IEEE Trans. Plasma Sci. PS-14 78–91, 1986.
-
(1986)
IEEE Trans. Plasma Sci
, vol.PS-14
, pp. 78-91
-
-
Graves, D.B.1
Jensen, K.F.2
-
7
-
-
0000048243
-
Numerical model of RF glow discharge
-
J. Boeuf, “Numerical model of RF glow discharge,” Phys. Rev. A 36 6 2782–2792, 1987.
-
(1987)
Phys. Rev. A
, vol.36
, Issue.6
, pp. 2782-2792
-
-
Boeuf, J.1
-
8
-
-
0000044491
-
Continuum modeling of argon radio-frequency glow discharges
-
A. D. Richards, B. E. Thompson, and H. H. Sawin, “Continuum modeling of argon radio-frequency glow discharges,” Appl Phys. Lett. 50 9, 492–494, 1987.
-
(1987)
Appl Phys. Lett
, vol.50
, Issue.9
, pp. 492-494
-
-
Richards, A.D.1
Thompson, B.E.2
Sawin, H.H.3
-
9
-
-
36549101828
-
Large-signal timedomain domain modeling of low-pressure RF glow discharges
-
see also, “A staggered-mesh mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges, ” J. Comp. Phys. 77 1, 53–71, 1988.
-
M. S. Barnes, T. J. Colter, and M. E. Elta, “Large-signal timedomain domain modeling of low-pressure RF glow discharges,” J. Appl. Phys. 61 1 81–89, 1987; see also, “A staggered-mesh mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges,” J. Comp. Phys. 77 1, 53–71, 1988.
-
(1987)
J. Appl. Phys
, vol.61
, Issue.1
, pp. 81-89
-
-
Barnes, M.S.1
Colter, T.J.2
Elta, M.E.3
-
10
-
-
36549097576
-
Fluid model simulations of a 13.56-MHz RF discharge: Time and space dependence of rates of electron impact excitation
-
D. B. Graves, “Fluid model simulations of a 13.56-MHz RF discharge: Time and space dependence of rates of electron impact excitation,” J. Appl. Phys. 62 1, 88–94, 1987.
-
(1987)
J. Appl. Phys
, vol.62
, Issue.1
, pp. 88-94
-
-
Graves, D.B.1
-
11
-
-
0000980672
-
Comparison of experimental measurements and model predictions for radio-frequency Ar and SF6 discharges
-
E. Gogolides, J. Nicolai, and H. H. Sawin, “Comparison of experimental measurements and model predictions for radio-frequency Ar and SF 6 discharges,” J. Vac. Sci. Technol A7 3, 1001–1005, 1989.
-
(1989)
J. Vac. Sci. Technol
, vol.A7
, Issue.3
, pp. 1001-1005
-
-
Gogolides, E.1
Nicolai, J.2
Sawin, H.H.3
-
12
-
-
33749874344
-
Numerical model for RF discharge in low-pressure electronegative gas
-
V. V. Boiko et al., “Numerical model for RF discharge in low-pressure electronegative gas,” Sov. J. Plasma Phys. 15 7 504–505, 1989.
-
(1989)
Sov. J. Plasma Phys
, vol.15
, Issue.7
, pp. 504-505
-
-
Boiko, V.V.1
-
14
-
-
84861589258
-
Studies of gas discharges for dry etching modeling and diagnostics
-
Stanford Univ., Palo Alto, CA
-
A. Paranjpe, “Studies of gas discharges for dry etching modeling and Ph.D. thesis, Stanford Univ., Palo Alto, CA, 1989.
-
(1989)
Ph.D. thesis
-
-
Paranjpe, A.1
-
15
-
-
36549092305
-
A numerical simulation of RF glow discharge containing an electronegative gas composition
-
Y.-H. Oh, N.-H. Choi, and D.-I. Choi, “A numerical simulation of RF glow discharge containing an electronegative gas composition,” J. Appl. Phys. 67 7 3264–3268, 1990.
-
(1990)
J. Appl. Phys
, vol.67
, Issue.7
, pp. 3264-3268
-
-
Oh, Y.-H.1
Choi, N.-H.2
Choi, D.-I.3
-
16
-
-
0000681662
-
Glow discharge simulation through solutions to the moments of the Boltzmann transport equation
-
M. Meyyappan and J. Kreskovsky, “Glow discharge simulation through solutions to the moments of the Boltzmann transport equation,” J. Appl. Phys. 68 4, 1506–1512, 1990.
-
(1990)
J. Appl. Phys
, vol.68
, Issue.4
, pp. 1506-1512
-
-
Meyyappan, M.1
Kreskovsky, J.2
-
17
-
-
0001394090
-
Two-dimensional simulations of RF glow discharges in N2 and SF 6
-
J. H. Tsai and C. Wu, “Two-dimensional simulations of RF glow discharges in N2 and SF6,” Phys. Rev. A 41 10, 5626–5644, 1990.
-
(1990)
Phys. Rev. A
, vol.41
, Issue.10
, pp. 5626-5644
-
-
Tsai, J.H.1
Wu, C.2
-
18
-
-
4143066259
-
Electron heating mechanisms in helium RF glow discharges: A self-consistent kidnetic calculation
-
T. J. Sommerer, W. N. G. Hitchon, and J. E. Lawler, “Electron heating mechanisms in helium RF glow discharges: a self-consistent kinetic calculation,” Phys. Rev. Lett. 63 21 2361–2364, 1989.
-
(1989)
Phys. Rev. Lett
, vol.63
, Issue.21
, pp. 2361-2364
-
-
Sommerer, T.J.1
Hitchon, W.N.G.2
Lawler, J.E.3
-
19
-
-
0002411669
-
Self-consistent simulation of a parallel-plate RE discharge
-
R. W. Boswell and I. J. Morey, “Self-consistent simulation of a parallel-plate RE discharge,” Appl. Phys. Lett. 52 1 21–23, 1988.
-
(1988)
Appl. Phys. Lett
, vol.52
, Issue.1
, pp. 21-23
-
-
Boswell, R.W.1
Morey, I.J.2
-
20
-
-
0025468437
-
Numerical modeling of low pressure RF plasmas
-
D. Vender and R. W. Boswell, “Numerical modeling of low pressure RF plasmas,” IEEE Trans. Plasma Sci. 18 725–732, 1990.
-
(1990)
IEEE Trans. Plasma Sci
, vol.18
, pp. 725-732
-
-
Vender, D.1
Boswell, R.W.2
-
21
-
-
0000226376
-
Electron heating in low-pressure RF glow discharges
-
M. Surendra, D. B. Graves, and I. J. Morey, “Electron heating in low-pressure RF glow discharges,” Appl. Phys. Lett. 56 11 1022–1024, 1990.
-
(1990)
Appl. Phys. Lett
, vol.56
, Issue.11
, pp. 1022-1024
-
-
Surendra, M.1
Graves, D.B.2
Morey, I.J.3
-
22
-
-
84941456728
-
Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC
-
this issue.
-
C. K. Birdsall, “Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC,” IEEE Trans. Plasma Sci., this issue.
-
IEEE Trans. Plasma Sci
-
-
Birdsall, C.K.1
-
23
-
-
0004789576
-
Simplified models of electron excitation and ionization at very high Em
-
A. V. Phelps, B. M. Jelenkovic, and S. A. Self, “Simplified models of electron excitation and ionization at very high Em,” Phys. Rev. A 36 11, 5327–5536, 1987.
-
(1987)
Phys. Rev. A
, vol.36
, Issue.11
, pp. 5327-5536
-
-
Phelps, A.V.1
Jelenkovic, B.M.2
Self, S.A.3
-
24
-
-
84941434021
-
Local field and ballistic electron models for low pressure RF and dc glow discharges
-
G. S. Mathad, G. C. Schwartz, and D. W. Hess, Eds. Pennington, NJ: Electrochem. Soc.
-
R. A. Gottscho et al., “Local field and ballistic electron mod-els for low pressure RF and dc glow discharges,” in Proc. 7th Symp. Plasma Process., G. S. Mathad, G. C. Schwartz, and D. W. Hess, Eds. Pennington, NJ: Electrochem. Soc., 1988 88–22, 1–16.
-
(1988)
Proc. 7th Symp. Plasma Process
, vol.88-22
, pp. 1-16
-
-
Gottscho, R.A.1
-
25
-
-
0003056028
-
Fundamental properties of RF glow discharges: An approach based on self-consistent numerical models
-
M. Capitelli and J. M. Bardsley, Eds. New York: Plenum
-
J. Boeuf and Ph. Belenguer, “Fundamental properties of RF glow discharges: An approach based on self-consistent numerical models,” in Non-Equilibrium Processes in Partially Ionized Gases (NATO ASI Series), M. Capitelli and J. M. Bardsley, Eds. New York: Plenum, 1990.
-
(1990)
Non-Equilibrium Processes in Partially Ionized Gases (NATO ASI Series)
-
-
Boeuf, J.1
Belenguer, P.H.2
-
26
-
-
0000934011
-
Self-consistent model of a direct-current glow discharge: Treatment of fast electrons
-
M. Surendra, D. B. Graves, and G. M. Jellum, “Self-consistent model of a direct-current glow discharge: Treatment of fast electrons,” Phys. Rev. A, vol. 41 2 1112–1125, 1990.
-
(1990)
Phys. Rev. A
, vol.41
, Issue.2
, pp. 1112-1125
-
-
Surendra, M.1
Graves, D.B.2
Jellum, G.M.3
-
27
-
-
0001416615
-
Statistical heating of electrons at an oscillating plasma boundary
-
V. A. Godyak, “Statistical heating of electrons at an oscillating plasma boundary,” Soy. Phys.-Tech. Phys. 16 7 1073–1076, 1972.
-
(1972)
Soy. Phys.-Tech. Phys
, vol.16
, Issue.7
, pp. 1073-1076
-
-
Godyak, V.A.1
-
28
-
-
0022704635
-
Mechanisms for power deposition in AR/SiH4 capacitively coupled RF discharges
-
M. J. Kushner, “Mechanisms for power deposition in AR/SiH4 capacitively coupled RF discharges,” IEEE Trans. Plasma Sci. P5-14 188–196, 1986.
-
(1986)
IEEE Trans. Plasma Sci
, vol.PS-14
, pp. 188-196
-
-
Kushner, M.J.1
-
30
-
-
0000204842
-
An investigation of the sparking potential of a HF discharge in a gas in the transition range of frequencies and pressures
-
S. M. Levitskii, “An investigation of the sparking potential of a HF discharge in a gas in the transition range of frequencies and pressures,” Soy. Phys.-Tech. Phys. 2 887–893, 1957.
-
(1957)
Soy. Phys. Tech. Phys
, vol.2
, pp. 887-893
-
-
Levitskii, S.M.1
-
31
-
-
1842862843
-
Medium pressure high-current high-frequency capacitive discharge
-
N. A. Yatsenko, “Medium pressure high-current high-frequency capacitive discharge,” Soy. Phys.-Tech. Phys. 25 1454–1455, 1980.
-
(1980)
Soy. Phys.-Tech. Phys
, vol.25
, pp. 1454-1455
-
-
Yatsenko, N.A.1
-
32
-
-
0022703125
-
Ion bombardment secondary electron maintenance of steady RF discharge
-
V. A. Godyak and A. S. Khanneh, “Ion bombardment secondary electron maintenance of steady RF discharge,” IEEE Trans. Plasma Sci. PS-14, 112–123, 1986.
-
(1986)
IEEE Trans. Plasma Sci
, vol.PS-14
, pp. 112-123
-
-
Godyak, V.A.1
Khanneh, A.S.2
-
33
-
-
0000440170
-
Transition between different regimes of RF glow discharge
-
Ph. Belenguer and J. Boeuf, “Transition between different regimes of RF glow discharge,” Phys. Rev. A 41 8 4447–4459, 1990.
-
(1990)
Phys. Rev. A
, vol.41
, Issue.8
, pp. 4447-4459
-
-
Belenguer, P.H.1
Boeuf, J.2
-
36
-
-
0004153441
-
Recommended values of transport cross sections for elastic collision and total collision cross section for electrons in atomic and molecular gases
-
M. Hayashi, “Recommended values of transport cross sections for elastic collision and total collision cross section for electrons in atomic and molecular gases,” Instit. Plasma Phys., Nagoya Univ., Tech. Rep. IPPJ-AM-19, 1981.
-
(1981)
Instit. Plasma Phys., Nagoya Univ., Tech. Rep. IPPJ-AM-19
-
-
Hayashi, M.1
-
37
-
-
30844450637
-
Total cross sections for ionization and attachment in gases by electron impact, I: Positive ionization
-
D. Rapp and Englander-Golden, “Total cross sections for ionization and attachment in gases by electron impact, I: Positive ionization,” J. Chem. Phys. 43 5 1464–1479, 1965.
-
(1965)
J. Chem. Phys
, vol.43
, Issue.5
, pp. 1464-1479
-
-
Rapp, D.1
Englander-Golden, P.2
-
38
-
-
0003808207
-
-
Berlin: Springer-Verlag
-
R. K. Janev, W. D. Langer, K. Evans, Jr., and D. E. Post, Jr., Elementary Processes in Hydrogen-Helium Plasmas. Berlin: Springer-Verlag, 1987 190–191.
-
(1987)
Elementary Processes in Hydrogen-Helium Plasmas
, pp. 190-191
-
-
Janev, R.K.1
Langer, W.D.2
Evans, K.3
Post, D.E.4
-
39
-
-
36849103454
-
Measurements of secondary-electron spectra produced by electron impact ionization of a number of simple gases
-
C. B. Opal, W. K. Peterson, and E. C. Beaty, “Measurements of secondary-electron spectra produced by electron impact ionization of a number of simple gases,” J. Chem. Phys. 55 8 4100–4106, 1971.
-
(1971)
J. Chem. Phys
, vol.55
, Issue.8
, pp. 4100-4106
-
-
Opal, C.B.1
Peterson, W.K.2
Beaty, E.C.3
-
40
-
-
0000260315
-
Laser optogalvanic galvanic and fluorescence studies of the cathode region of a glow discharge
-
E. A. Den Hartog, D. A. Doughty, and J. E. Lawler, “Laser optogalvanic galvanic and fluorescence studies of the cathode region of a glow discharge,” Phys. Rev. A 38 5 2471–2491, 1988.
-
(1988)
Phys. Rev. A
, vol.38
, Issue.5
, pp. 2471-2491
-
-
Den Hartog, E.A.1
Doughty, D.A.2
Lawler, J.E.3
-
41
-
-
36149013293
-
Reflection of very slow electrons
-
H. A. Fowler and H. E. Farnsworth, “Reflection of very slow electrons,” Phys. Rev. 111 1 103–112, 1958.
-
(1958)
Phys. Rev
, vol.111
, Issue.1
, pp. 103-112
-
-
Fowler, H.A.1
Farnsworth, H.E.2
-
42
-
-
0041053874
-
The reflection of slow electrons from a soot-covered surface
-
N. L. S. Martin and A. von Engel, “The reflection of slow electrons from a soot-covered surface,” J. Phys. D 10 863–868, 1977.
-
(1977)
J. Phys. D
, vol.10
, pp. 863-868
-
-
Martin, N.L.S.1
Von Engel, A.2
-
43
-
-
0022705619
-
Negative ion kinetics in RF glow discharges
-
R. A. Gottscho and C. E. Gaebe, “Negative ion kinetics in RF glow discharges,” IEEE Trans. Plasma Sci. PS-14 92–102, 1986.
-
(1986)
IEEE Trans. Plasma Sci
, vol.PS-14
, pp. 92-102
-
-
Gottscho, R.A.1
Gaebe, C.E.2
-
44
-
-
0001679405
-
Glow-discharge sheath electric fields: Negativeion, power, and frequency effects
-
R. A. Gottscho, “Glow-discharge sheath electric fields: Negativeion, power, and frequency effects,” Phys. Rev. A 36 5 2233–2242, 1987.
-
(1987)
Phys. Rev. A
, vol.36
, Issue.5
, pp. 2233-2242
-
-
Gottscho, R.A.1
-
45
-
-
0004001869
-
Electronbeam probe measurements of electric fields in RF discharges
-
A. H. Sato and M. A. Lieberman, “Electronbeam probe measurements of electric fields in RF discharges,” J. AppL Phys. 68 12 6117–6124, 1990.
-
(1990)
J. AppL Phys
, vol.68
, Issue.12
, pp. 6117-6124
-
-
Sato, A.H.1
Lieberman, M.A.2
-
46
-
-
36549100807
-
Plasma potentials of 13.56 MHz RF argon glow discharges in a planar system
-
K. Kohler, J. W. Coburn, D. E. Home, and E. Kay, “Plasma potentials of 13.56 MHz RF argon glow discharges in a planar system,” J. AppL Phys. 57 1 59–66, 1985.
-
(1985)
J. AppL Phys
, vol.57
, Issue.1
, pp. 59-66
-
-
Kohler, K.1
Coburn, J.W.2
Home, D.E.3
Kay, E.4
-
47
-
-
0021410891
-
Ion dynamics of RF plasmas and plasma sheaths: A time-resolved spectroscopic study
-
R. A. Gottscho, R. H. Burton, D. L. Flamm, V. M. Donnelly, and G. Davis, “Ion dynamics of RF plasmas and plasma sheaths: A time-resolved spectroscopic study,” J. AppL Phys. 55 2707–2714, 1984.
-
(1984)
J. AppL Phys
, vol.55
, pp. 2707-2714
-
-
Gottscho, R.A.1
Burton, R.H.2
Flamm, D.L.3
Donnelly, V.M.4
Davis, G.5
-
48
-
-
36549102085
-
Frequency dependence of ion bombardment of grounded surfaces in RF argon glow discharges in a planar system
-
K. Kohler, D. E. Home, and J. W. Coburn, “Frequency dependence of ion bombardment of grounded surfaces in RF argon glow discharges in a planar system,” J. Appl. Phys. 58 9 3350–3355, 1985.
-
(1985)
J. Appl. Phys
, vol.58
, Issue.9
, pp. 3350-3355
-
-
Kohler, K.1
Home, D.E.2
Coburn, J.W.3
-
49
-
-
0022704432
-
The spatial and temporal evolution of the glow in an RF discharge
-
G. A. Hebner and J. T. Verdeyen, “The spatial and temporal evolution of the glow in an RF discharge,” IEEE Trans. Plasma Sci. PS-14 132–136, 1986.
-
(1986)
IEEE Trans. Plasma Sci
, vol.PS-14
, pp. 132-136
-
-
Hebner, G.A.1
Verdeyen, J.T.2
-
50
-
-
0023430145
-
Time-and space-resolved spectroscopy of electron transport in low-frequency discharge plasma in argon
-
T. Makabe and M. Nakaya, “Time-and space-resolved spec-troscopy of electron transport in low-frequency discharge plasma in argon,” J. Phys. D 20 1243–1249, 1987.
-
(1987)
J. Phys. D
, vol.20
, pp. 1243-1249
-
-
Makabe, T.1
Nakaya, M.2
-
51
-
-
0018488288
-
Measurement of electron energy distribution in an RF plasma
-
V. A. Godyak and S. N. Oks, “Measurement of electron energy distribution in an RF plasma,” Soy. Phys.-Tech. Phys. 24 7 784–785, 1979.
-
(1979)
Soy. Phys.-Tech. Phys
, vol.24
, Issue.7
, pp. 784-785
-
-
Godyak, V.A.1
Oks, S.N.2
-
52
-
-
0000468232
-
Abnormally low electron energy and heating mode transition in a low pressure argon RF discharge at 13.56 MHz
-
V. A. Godyak and R. B. Piejak, “Abnormally low electron energy and heating mode transition in a low pressure argon RF discharge at 13.56 MHz,” Phys. Rev. Lett. 65 8 996–999, 1990.
-
(1990)
Phys. Rev. Lett
, vol.65
, Issue.8
, pp. 996-999
-
-
Godyak, V.A.1
Piejak, R.B.2
-
53
-
-
0019010907
-
A comparative study of the radiofrequency discharge in gas mixtures of helium with fluorine, oxygen, nitrogen, and argon
-
M. J. Vasile, “A comparative study of the radiofrequency discharge in gas mixtures of helium with fluorine, oxygen, nitrogen, and argon,” J. AppL Phys. 51 5 2503–2509, 1980.
-
(1980)
J. AppL Phys
, vol.51
, Issue.5
, pp. 2503-2509
-
-
Vasile, M.J.1
-
54
-
-
0023399836
-
An elec-trostatic probe technique for RF plasma
-
N. St. Braithwaite, N. M. Benjamin, and J. E. Allen, “An elec-trostatic probe technique for RF plasma,” J. Phys. E: Sci. Instrum. 20 1046–1049, 1987.
-
(1987)
J. Phys. E: Sci. Instrum
, vol.20
, pp. 1046-1049
-
-
Braithwaite, N.ST.1
Benjamin, N.M.2
Allen, J.E.3
-
55
-
-
0023384735
-
The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas
-
T. I. Cox et al., “The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas,” J. Phys. D: AppL Phys. 20 820–831, 1987.
-
(1987)
J. Phys. D: AppL Phys
, vol.20
, pp. 820-831
-
-
Cox, T.I.1
-
56
-
-
84957279418
-
Measurements of time-varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge
-
J. L. Wilson, J. B. O. Caughman II, L. Nguyen, and D. N. Ruzic, “Measurements of time-varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge,” J. Vac. Sci. Technol. A7 972–976, 1989.
-
(1989)
J. Vac. Sci. Technol
, vol.A7
, pp. 972-976
-
-
Wilson, J.L.1
Caughman Ii, J.B.O.2
Nguyen, L.3
Ruzic, D.N.4
-
57
-
-
0001435610
-
A tuned Langmuir probe for measurements in RF glow discharges
-
A. Paranjpe, J. McVittie, and S. A. Self, “A tuned Langmuir probe for measurements in RF glow discharges,” J. Appl. Phys. 67 11, 6718–6727, 1990.
-
(1990)
J. Appl. Phys
, vol.67
, Issue.11
, pp. 6718-6727
-
-
Paranjpe, A.1
Mcvittie, J.2
Self, S.A.3
-
58
-
-
36849111467
-
Plasma diagnostics and energy transport of a dc discharge used for sputtering
-
D. J. Ball, “Plasma diagnostics and energy transport of a dc discharge used for sputtering,” J. Appl. Phys. 43 7 3047–3056, 1972.
-
(1972)
J. Appl. Phys
, vol.43
, Issue.7
, pp. 3047-3056
-
-
Ball, D.J.1
-
59
-
-
0000160202
-
Electron temperature and density diagnostics in a helium glow discharge
-
E. A. Den Hartog, T. R. O’Brian, and J. E. Lawler, “Electron temperature and density diagnostics in a helium glow discharge,” Phys. Rev. Lett. 62 1500–1503, 1989.
-
(1989)
Phys. Rev. Lett
, vol.62
, pp. 1500-1503
-
-
Den Hartog, E.A.1
O’Brian, T.R.2
Lawler, J.E.3
-
60
-
-
84956076630
-
Time-resolved electron energy distribution function measurements in a low-frequency frequency RF glow discharge
-
M. B. Hopkins, C. A. Anderson, and W. G. Graham, “Time-resolved electron energy distribution function measurements in a low-frequency frequency RF glow discharge,” Europhys. Lett. 8 2 141–145, 1989.
-
(1989)
Europhys. Lett
, vol.8
, Issue.2
, pp. 141-145
-
-
Hopkins, M.B.1
Anderson, C.A.2
Graham, W.G.3
-
61
-
-
0043100946
-
An experimental study of a parallel-plate radio-frequency discharge: Measurements of the radiation temperature and electron density
-
G. A. Hebner, J. T. Verdeyen, and M. J. Kushner, “An experimental study of a parallel-plate radio-frequency discharge: Measurements of the radiation temperature and electron density,” J. Appl. Phys., vol. 63, no. 7, pp. 2226-2236, 1988.
-
(1988)
J. Appl. Phys
, vol.63
, Issue.7
, pp. 2226-2236
-
-
Hebner, G.A.1
Verdeyen, J.T.2
Kushner, M.J.3
-
62
-
-
84891325268
-
Electron energy distribution in a low pressure RF discharge plasma in xenon
-
A. P. Eshov and A. A. Kuzovnikov, “Electron energy distribution in a low pressure RF discharge plasma in xenon,” Sov. J. Plasma Phys., vol. 11, no. 5, pp. 361-363, 1985.
-
(1985)
Sov. J. Plasma Phys
, vol.11
, Issue.5
, pp. 361-363
-
-
Eshov, A.P.1
Kuzovnikov, A.A.2
-
63
-
-
84941469932
-
On the presence of fast electrons in RF discharges: Langmuir probe measurements
-
presented at the XIX Int. J. M. Labat Ed.
-
G. Dilecce, S. De Benedictis, M. Capitelli, and C. Gorse, “On the presence of fast electrons in RF discharges: Langmuir probe measurements,” presented at the XIX Int. Conf. Phenomena in Ionized Gases, Belgrade, 1989, J. M. Labat, Ed.
-
(1989)
Conf. Phenomena in Ionized Gases, Belgrade
-
-
Dilecce, G.1
De Benedictis, S.2
Capitelli, M.3
Gorse, C.4
-
64
-
-
0024879422
-
Computer simulation of materials processing plasma discharges
-
Solid State Mater. Sci.
-
L. E. Kline and M. J. Kushner, “Computer simulation of materials processing plasma discharges,” Solid State Mater. Sci., vol. 16, no. 1, pp. 1-35, 1989
-
, vol.16
, Issue.1
, pp. 1-35
-
-
Kline, L.E.1
Kushner, M.J.2
-
65
-
-
0000393088
-
Structured ion energy distribution in radiofrequency glow-discharge systems
-
Ch. Wild and P. Koidl, “Structured ion energy distribution in radiofrequency glow-discharge systems,” Appl. Phys. Lett., vol. 54, no. 6, pp. 505-507, 1989.
-
(1989)
Appl. Phys. Lett
, vol.54
, Issue.6
, pp. 505-507
-
-
Wild, C.1
Koidl, P.2
-
66
-
-
36549099421
-
Distribution of ion energies incident on electrodes in capacitively coupled RF discharges
-
M. J. Kushner, “Distribution of ion energies incident on electrodes in capacitively coupled RF discharges,” J. Appl. Phys., vol. 58, no. 11, pp. 4024-4031, 1985.
-
(1985)
J. Appl. Phys
, vol.58
, Issue.11
, pp. 4024-4031
-
-
Kushner, M.J.1
-
67
-
-
36549092475
-
Monte Carlo simulation of ion transport through RF glow-discharge sheaths
-
B.E. Thompson, H.H. Sawin, and D.A. Fisher, “Monte Carlo simulation of ion transport through RF glow-discharge sheaths,” J. Appl. Phys., vol. 63, no. 7, pp. 2241-2251, 1988.
-
(1988)
J. Appl. Phys
, vol.63
, Issue.7
, pp. 2241-2251
-
-
Thompson, B.E.1
Sawin, H.H.2
Fisher, D.A.3
-
68
-
-
0000528150
-
Ion bombardment in RF discharges
-
J. Liu, G.L. Huppert, and H.H. Sawin, “Ion bombardment in RF discharges,” J. Appl. Phys., vol. 68, no. 8, pp. 3916-3934, 1990.
-
(1990)
J. Appl. Phys
, vol.68
, Issue.8
, pp. 3916-3934
-
-
Liu, J.1
Huppert, G.L.2
Sawin, H.H.3
-
69
-
-
84941445206
-
Measurement of the electrical characteristics of a symmetric RF discharge in argon
-
Palo Alto, CA
-
R. B. Piejak and V. A. Godyak, “Measurement of the electrical characteristics of a symmetric RF discharge in argon,” presented at the 42nd Ann. Gaseous Electron. Conf., Palo Alto, CA, 1989.
-
(1989)
presented at the 42nd Ann. Gaseous Electron. Conf
-
-
Piejak, R.B.1
Godyak, V.A.2
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