메뉴 건너뛰기




Volumn 19, Issue 2, 1991, Pages 144-157

Particle Simulations of Radio-Frequency Glow Discharges

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; HELIUM; PLASMAS;

EID: 0026137242     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.106808     Document Type: Article
Times cited : (236)

References (69)
  • 2
    • 0024131141 scopus 로고
    • Analytical solution for capacitive RF sheath
    • Dec. see also, “Dynamics of a collisional, capacitive RF sheath, ” IEEE Trans. Plasma Sci. 17 338–341 Apr. 1989
    • M. A. Lieberman, “Analytical solution for capacitive RF sheath,” IEEE Trans. Plasma Sci. 16 638–644, Dec. 1988; see also, “Dynamics of a collisional, capacitive RF sheath,” IEEE Trans. Plasma Sci. 17, 338–341, Apr. 1989.
    • (1988) IEEE Trans. Plasma Sci , vol.16 , pp. 638-644
    • Lieberman, M.A.1
  • 3
    • 0008230535 scopus 로고
    • Macroscopic modeling of radio-frequency plasma discharges
    • G. R. Misium, A. J. Lichtenberg, and M. A. Lieberman, “Macroscopic modeling of radio-frequency plasma discharges,” J. Vac. Sci. Technol A7 3 1007–1013, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 1007-1013
    • Misium, G.R.1    Lichtenberg, A.J.2    Lieberman, M.A.3
  • 4
    • 0014761931 scopus 로고
    • Application of RF discharges to sputtering
    • H. R. Koenig and L. I. Maissel, “Application of RF discharges to sputtering,” IBM J. Res. Dey. 14 168–171, 1970.
    • (1970) IBM J. Res. Dey , vol.14 , pp. 168-171
    • Koenig, H.R.1    Maissel, L.I.2
  • 5
    • 11644321945 scopus 로고
    • Electrical properties of planar RF discharges for dry etching
    • A. J. van Roosmalen, W. G. M. van den Hoek, and H. Kalter, “Electrical properties of planar RF discharges for dry etching,” J. Appl Phys. 58 2 653–658, 1985.
    • (1985) J. Appl Phys , vol.58 , Issue.2 , pp. 653-658
    • Van Roosmalen, A.J.1    Van Den Hoek, W.G.M.2    Kalter, H.3
  • 6
    • 0022706010 scopus 로고
    • A continuum model of dc and RF discharges
    • D. B. Graves and K. F. Jensen, “A continuum model of dc and RF discharges,” IEEE Trans. Plasma Sci. PS-14 78–91, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 78-91
    • Graves, D.B.1    Jensen, K.F.2
  • 7
    • 0000048243 scopus 로고
    • Numerical model of RF glow discharge
    • J. Boeuf, “Numerical model of RF glow discharge,” Phys. Rev. A 36 6 2782–2792, 1987.
    • (1987) Phys. Rev. A , vol.36 , Issue.6 , pp. 2782-2792
    • Boeuf, J.1
  • 8
    • 0000044491 scopus 로고
    • Continuum modeling of argon radio-frequency glow discharges
    • A. D. Richards, B. E. Thompson, and H. H. Sawin, “Continuum modeling of argon radio-frequency glow discharges,” Appl Phys. Lett. 50 9, 492–494, 1987.
    • (1987) Appl Phys. Lett , vol.50 , Issue.9 , pp. 492-494
    • Richards, A.D.1    Thompson, B.E.2    Sawin, H.H.3
  • 9
    • 36549101828 scopus 로고
    • Large-signal timedomain domain modeling of low-pressure RF glow discharges
    • see also, “A staggered-mesh mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges, ” J. Comp. Phys. 77 1, 53–71, 1988.
    • M. S. Barnes, T. J. Colter, and M. E. Elta, “Large-signal timedomain domain modeling of low-pressure RF glow discharges,” J. Appl. Phys. 61 1 81–89, 1987; see also, “A staggered-mesh mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges,” J. Comp. Phys. 77 1, 53–71, 1988.
    • (1987) J. Appl. Phys , vol.61 , Issue.1 , pp. 81-89
    • Barnes, M.S.1    Colter, T.J.2    Elta, M.E.3
  • 10
    • 36549097576 scopus 로고
    • Fluid model simulations of a 13.56-MHz RF discharge: Time and space dependence of rates of electron impact excitation
    • D. B. Graves, “Fluid model simulations of a 13.56-MHz RF discharge: Time and space dependence of rates of electron impact excitation,” J. Appl. Phys. 62 1, 88–94, 1987.
    • (1987) J. Appl. Phys , vol.62 , Issue.1 , pp. 88-94
    • Graves, D.B.1
  • 11
    • 0000980672 scopus 로고
    • Comparison of experimental measurements and model predictions for radio-frequency Ar and SF6 discharges
    • E. Gogolides, J. Nicolai, and H. H. Sawin, “Comparison of experimental measurements and model predictions for radio-frequency Ar and SF 6 discharges,” J. Vac. Sci. Technol A7 3, 1001–1005, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , Issue.3 , pp. 1001-1005
    • Gogolides, E.1    Nicolai, J.2    Sawin, H.H.3
  • 12
    • 33749874344 scopus 로고
    • Numerical model for RF discharge in low-pressure electronegative gas
    • V. V. Boiko et al., “Numerical model for RF discharge in low-pressure electronegative gas,” Sov. J. Plasma Phys. 15 7 504–505, 1989.
    • (1989) Sov. J. Plasma Phys , vol.15 , Issue.7 , pp. 504-505
    • Boiko, V.V.1
  • 14
    • 84861589258 scopus 로고
    • Studies of gas discharges for dry etching modeling and diagnostics
    • Stanford Univ., Palo Alto, CA
    • A. Paranjpe, “Studies of gas discharges for dry etching modeling and Ph.D. thesis, Stanford Univ., Palo Alto, CA, 1989.
    • (1989) Ph.D. thesis
    • Paranjpe, A.1
  • 15
    • 36549092305 scopus 로고
    • A numerical simulation of RF glow discharge containing an electronegative gas composition
    • Y.-H. Oh, N.-H. Choi, and D.-I. Choi, “A numerical simulation of RF glow discharge containing an electronegative gas composition,” J. Appl. Phys. 67 7 3264–3268, 1990.
    • (1990) J. Appl. Phys , vol.67 , Issue.7 , pp. 3264-3268
    • Oh, Y.-H.1    Choi, N.-H.2    Choi, D.-I.3
  • 16
    • 0000681662 scopus 로고
    • Glow discharge simulation through solutions to the moments of the Boltzmann transport equation
    • M. Meyyappan and J. Kreskovsky, “Glow discharge simulation through solutions to the moments of the Boltzmann transport equation,” J. Appl. Phys. 68 4, 1506–1512, 1990.
    • (1990) J. Appl. Phys , vol.68 , Issue.4 , pp. 1506-1512
    • Meyyappan, M.1    Kreskovsky, J.2
  • 17
    • 0001394090 scopus 로고
    • Two-dimensional simulations of RF glow discharges in N2 and SF 6
    • J. H. Tsai and C. Wu, “Two-dimensional simulations of RF glow discharges in N2 and SF6,” Phys. Rev. A 41 10, 5626–5644, 1990.
    • (1990) Phys. Rev. A , vol.41 , Issue.10 , pp. 5626-5644
    • Tsai, J.H.1    Wu, C.2
  • 18
    • 4143066259 scopus 로고
    • Electron heating mechanisms in helium RF glow discharges: A self-consistent kidnetic calculation
    • T. J. Sommerer, W. N. G. Hitchon, and J. E. Lawler, “Electron heating mechanisms in helium RF glow discharges: a self-consistent kinetic calculation,” Phys. Rev. Lett. 63 21 2361–2364, 1989.
    • (1989) Phys. Rev. Lett , vol.63 , Issue.21 , pp. 2361-2364
    • Sommerer, T.J.1    Hitchon, W.N.G.2    Lawler, J.E.3
  • 19
    • 0002411669 scopus 로고
    • Self-consistent simulation of a parallel-plate RE discharge
    • R. W. Boswell and I. J. Morey, “Self-consistent simulation of a parallel-plate RE discharge,” Appl. Phys. Lett. 52 1 21–23, 1988.
    • (1988) Appl. Phys. Lett , vol.52 , Issue.1 , pp. 21-23
    • Boswell, R.W.1    Morey, I.J.2
  • 20
    • 0025468437 scopus 로고
    • Numerical modeling of low pressure RF plasmas
    • D. Vender and R. W. Boswell, “Numerical modeling of low pressure RF plasmas,” IEEE Trans. Plasma Sci. 18 725–732, 1990.
    • (1990) IEEE Trans. Plasma Sci , vol.18 , pp. 725-732
    • Vender, D.1    Boswell, R.W.2
  • 21
    • 0000226376 scopus 로고
    • Electron heating in low-pressure RF glow discharges
    • M. Surendra, D. B. Graves, and I. J. Morey, “Electron heating in low-pressure RF glow discharges,” Appl. Phys. Lett. 56 11 1022–1024, 1990.
    • (1990) Appl. Phys. Lett , vol.56 , Issue.11 , pp. 1022-1024
    • Surendra, M.1    Graves, D.B.2    Morey, I.J.3
  • 22
    • 84941456728 scopus 로고    scopus 로고
    • Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC
    • this issue.
    • C. K. Birdsall, “Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC,” IEEE Trans. Plasma Sci., this issue.
    • IEEE Trans. Plasma Sci
    • Birdsall, C.K.1
  • 23
    • 0004789576 scopus 로고
    • Simplified models of electron excitation and ionization at very high Em
    • A. V. Phelps, B. M. Jelenkovic, and S. A. Self, “Simplified models of electron excitation and ionization at very high Em,” Phys. Rev. A 36 11, 5327–5536, 1987.
    • (1987) Phys. Rev. A , vol.36 , Issue.11 , pp. 5327-5536
    • Phelps, A.V.1    Jelenkovic, B.M.2    Self, S.A.3
  • 24
    • 84941434021 scopus 로고
    • Local field and ballistic electron models for low pressure RF and dc glow discharges
    • G. S. Mathad, G. C. Schwartz, and D. W. Hess, Eds. Pennington, NJ: Electrochem. Soc.
    • R. A. Gottscho et al., “Local field and ballistic electron mod-els for low pressure RF and dc glow discharges,” in Proc. 7th Symp. Plasma Process., G. S. Mathad, G. C. Schwartz, and D. W. Hess, Eds. Pennington, NJ: Electrochem. Soc., 1988 88–22, 1–16.
    • (1988) Proc. 7th Symp. Plasma Process , vol.88-22 , pp. 1-16
    • Gottscho, R.A.1
  • 25
    • 0003056028 scopus 로고
    • Fundamental properties of RF glow discharges: An approach based on self-consistent numerical models
    • M. Capitelli and J. M. Bardsley, Eds. New York: Plenum
    • J. Boeuf and Ph. Belenguer, “Fundamental properties of RF glow discharges: An approach based on self-consistent numerical models,” in Non-Equilibrium Processes in Partially Ionized Gases (NATO ASI Series), M. Capitelli and J. M. Bardsley, Eds. New York: Plenum, 1990.
    • (1990) Non-Equilibrium Processes in Partially Ionized Gases (NATO ASI Series)
    • Boeuf, J.1    Belenguer, P.H.2
  • 26
    • 0000934011 scopus 로고
    • Self-consistent model of a direct-current glow discharge: Treatment of fast electrons
    • M. Surendra, D. B. Graves, and G. M. Jellum, “Self-consistent model of a direct-current glow discharge: Treatment of fast electrons,” Phys. Rev. A, vol. 41 2 1112–1125, 1990.
    • (1990) Phys. Rev. A , vol.41 , Issue.2 , pp. 1112-1125
    • Surendra, M.1    Graves, D.B.2    Jellum, G.M.3
  • 27
    • 0001416615 scopus 로고
    • Statistical heating of electrons at an oscillating plasma boundary
    • V. A. Godyak, “Statistical heating of electrons at an oscillating plasma boundary,” Soy. Phys.-Tech. Phys. 16 7 1073–1076, 1972.
    • (1972) Soy. Phys.-Tech. Phys , vol.16 , Issue.7 , pp. 1073-1076
    • Godyak, V.A.1
  • 28
    • 0022704635 scopus 로고
    • Mechanisms for power deposition in AR/SiH4 capacitively coupled RF discharges
    • M. J. Kushner, “Mechanisms for power deposition in AR/SiH4 capacitively coupled RF discharges,” IEEE Trans. Plasma Sci. P5-14 188–196, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 188-196
    • Kushner, M.J.1
  • 30
    • 0000204842 scopus 로고
    • An investigation of the sparking potential of a HF discharge in a gas in the transition range of frequencies and pressures
    • S. M. Levitskii, “An investigation of the sparking potential of a HF discharge in a gas in the transition range of frequencies and pressures,” Soy. Phys.-Tech. Phys. 2 887–893, 1957.
    • (1957) Soy. Phys. Tech. Phys , vol.2 , pp. 887-893
    • Levitskii, S.M.1
  • 31
    • 1842862843 scopus 로고
    • Medium pressure high-current high-frequency capacitive discharge
    • N. A. Yatsenko, “Medium pressure high-current high-frequency capacitive discharge,” Soy. Phys.-Tech. Phys. 25 1454–1455, 1980.
    • (1980) Soy. Phys.-Tech. Phys , vol.25 , pp. 1454-1455
    • Yatsenko, N.A.1
  • 32
    • 0022703125 scopus 로고
    • Ion bombardment secondary electron maintenance of steady RF discharge
    • V. A. Godyak and A. S. Khanneh, “Ion bombardment secondary electron maintenance of steady RF discharge,” IEEE Trans. Plasma Sci. PS-14, 112–123, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 112-123
    • Godyak, V.A.1    Khanneh, A.S.2
  • 33
    • 0000440170 scopus 로고
    • Transition between different regimes of RF glow discharge
    • Ph. Belenguer and J. Boeuf, “Transition between different regimes of RF glow discharge,” Phys. Rev. A 41 8 4447–4459, 1990.
    • (1990) Phys. Rev. A , vol.41 , Issue.8 , pp. 4447-4459
    • Belenguer, P.H.1    Boeuf, J.2
  • 36
    • 0004153441 scopus 로고
    • Recommended values of transport cross sections for elastic collision and total collision cross section for electrons in atomic and molecular gases
    • M. Hayashi, “Recommended values of transport cross sections for elastic collision and total collision cross section for electrons in atomic and molecular gases,” Instit. Plasma Phys., Nagoya Univ., Tech. Rep. IPPJ-AM-19, 1981.
    • (1981) Instit. Plasma Phys., Nagoya Univ., Tech. Rep. IPPJ-AM-19
    • Hayashi, M.1
  • 37
    • 30844450637 scopus 로고
    • Total cross sections for ionization and attachment in gases by electron impact, I: Positive ionization
    • D. Rapp and Englander-Golden, “Total cross sections for ionization and attachment in gases by electron impact, I: Positive ionization,” J. Chem. Phys. 43 5 1464–1479, 1965.
    • (1965) J. Chem. Phys , vol.43 , Issue.5 , pp. 1464-1479
    • Rapp, D.1    Englander-Golden, P.2
  • 39
    • 36849103454 scopus 로고
    • Measurements of secondary-electron spectra produced by electron impact ionization of a number of simple gases
    • C. B. Opal, W. K. Peterson, and E. C. Beaty, “Measurements of secondary-electron spectra produced by electron impact ionization of a number of simple gases,” J. Chem. Phys. 55 8 4100–4106, 1971.
    • (1971) J. Chem. Phys , vol.55 , Issue.8 , pp. 4100-4106
    • Opal, C.B.1    Peterson, W.K.2    Beaty, E.C.3
  • 40
    • 0000260315 scopus 로고
    • Laser optogalvanic galvanic and fluorescence studies of the cathode region of a glow discharge
    • E. A. Den Hartog, D. A. Doughty, and J. E. Lawler, “Laser optogalvanic galvanic and fluorescence studies of the cathode region of a glow discharge,” Phys. Rev. A 38 5 2471–2491, 1988.
    • (1988) Phys. Rev. A , vol.38 , Issue.5 , pp. 2471-2491
    • Den Hartog, E.A.1    Doughty, D.A.2    Lawler, J.E.3
  • 41
    • 36149013293 scopus 로고
    • Reflection of very slow electrons
    • H. A. Fowler and H. E. Farnsworth, “Reflection of very slow electrons,” Phys. Rev. 111 1 103–112, 1958.
    • (1958) Phys. Rev , vol.111 , Issue.1 , pp. 103-112
    • Fowler, H.A.1    Farnsworth, H.E.2
  • 42
    • 0041053874 scopus 로고
    • The reflection of slow electrons from a soot-covered surface
    • N. L. S. Martin and A. von Engel, “The reflection of slow electrons from a soot-covered surface,” J. Phys. D 10 863–868, 1977.
    • (1977) J. Phys. D , vol.10 , pp. 863-868
    • Martin, N.L.S.1    Von Engel, A.2
  • 43
    • 0022705619 scopus 로고
    • Negative ion kinetics in RF glow discharges
    • R. A. Gottscho and C. E. Gaebe, “Negative ion kinetics in RF glow discharges,” IEEE Trans. Plasma Sci. PS-14 92–102, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 92-102
    • Gottscho, R.A.1    Gaebe, C.E.2
  • 44
    • 0001679405 scopus 로고
    • Glow-discharge sheath electric fields: Negativeion, power, and frequency effects
    • R. A. Gottscho, “Glow-discharge sheath electric fields: Negativeion, power, and frequency effects,” Phys. Rev. A 36 5 2233–2242, 1987.
    • (1987) Phys. Rev. A , vol.36 , Issue.5 , pp. 2233-2242
    • Gottscho, R.A.1
  • 45
    • 0004001869 scopus 로고
    • Electronbeam probe measurements of electric fields in RF discharges
    • A. H. Sato and M. A. Lieberman, “Electronbeam probe measurements of electric fields in RF discharges,” J. AppL Phys. 68 12 6117–6124, 1990.
    • (1990) J. AppL Phys , vol.68 , Issue.12 , pp. 6117-6124
    • Sato, A.H.1    Lieberman, M.A.2
  • 46
    • 36549100807 scopus 로고
    • Plasma potentials of 13.56 MHz RF argon glow discharges in a planar system
    • K. Kohler, J. W. Coburn, D. E. Home, and E. Kay, “Plasma potentials of 13.56 MHz RF argon glow discharges in a planar system,” J. AppL Phys. 57 1 59–66, 1985.
    • (1985) J. AppL Phys , vol.57 , Issue.1 , pp. 59-66
    • Kohler, K.1    Coburn, J.W.2    Home, D.E.3    Kay, E.4
  • 47
    • 0021410891 scopus 로고
    • Ion dynamics of RF plasmas and plasma sheaths: A time-resolved spectroscopic study
    • R. A. Gottscho, R. H. Burton, D. L. Flamm, V. M. Donnelly, and G. Davis, “Ion dynamics of RF plasmas and plasma sheaths: A time-resolved spectroscopic study,” J. AppL Phys. 55 2707–2714, 1984.
    • (1984) J. AppL Phys , vol.55 , pp. 2707-2714
    • Gottscho, R.A.1    Burton, R.H.2    Flamm, D.L.3    Donnelly, V.M.4    Davis, G.5
  • 48
    • 36549102085 scopus 로고
    • Frequency dependence of ion bombardment of grounded surfaces in RF argon glow discharges in a planar system
    • K. Kohler, D. E. Home, and J. W. Coburn, “Frequency dependence of ion bombardment of grounded surfaces in RF argon glow discharges in a planar system,” J. Appl. Phys. 58 9 3350–3355, 1985.
    • (1985) J. Appl. Phys , vol.58 , Issue.9 , pp. 3350-3355
    • Kohler, K.1    Home, D.E.2    Coburn, J.W.3
  • 49
    • 0022704432 scopus 로고
    • The spatial and temporal evolution of the glow in an RF discharge
    • G. A. Hebner and J. T. Verdeyen, “The spatial and temporal evolution of the glow in an RF discharge,” IEEE Trans. Plasma Sci. PS-14 132–136, 1986.
    • (1986) IEEE Trans. Plasma Sci , vol.PS-14 , pp. 132-136
    • Hebner, G.A.1    Verdeyen, J.T.2
  • 50
    • 0023430145 scopus 로고
    • Time-and space-resolved spectroscopy of electron transport in low-frequency discharge plasma in argon
    • T. Makabe and M. Nakaya, “Time-and space-resolved spec-troscopy of electron transport in low-frequency discharge plasma in argon,” J. Phys. D 20 1243–1249, 1987.
    • (1987) J. Phys. D , vol.20 , pp. 1243-1249
    • Makabe, T.1    Nakaya, M.2
  • 51
    • 0018488288 scopus 로고
    • Measurement of electron energy distribution in an RF plasma
    • V. A. Godyak and S. N. Oks, “Measurement of electron energy distribution in an RF plasma,” Soy. Phys.-Tech. Phys. 24 7 784–785, 1979.
    • (1979) Soy. Phys.-Tech. Phys , vol.24 , Issue.7 , pp. 784-785
    • Godyak, V.A.1    Oks, S.N.2
  • 52
    • 0000468232 scopus 로고
    • Abnormally low electron energy and heating mode transition in a low pressure argon RF discharge at 13.56 MHz
    • V. A. Godyak and R. B. Piejak, “Abnormally low electron energy and heating mode transition in a low pressure argon RF discharge at 13.56 MHz,” Phys. Rev. Lett. 65 8 996–999, 1990.
    • (1990) Phys. Rev. Lett , vol.65 , Issue.8 , pp. 996-999
    • Godyak, V.A.1    Piejak, R.B.2
  • 53
    • 0019010907 scopus 로고
    • A comparative study of the radiofrequency discharge in gas mixtures of helium with fluorine, oxygen, nitrogen, and argon
    • M. J. Vasile, “A comparative study of the radiofrequency discharge in gas mixtures of helium with fluorine, oxygen, nitrogen, and argon,” J. AppL Phys. 51 5 2503–2509, 1980.
    • (1980) J. AppL Phys , vol.51 , Issue.5 , pp. 2503-2509
    • Vasile, M.J.1
  • 55
    • 0023384735 scopus 로고
    • The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas
    • T. I. Cox et al., “The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas,” J. Phys. D: AppL Phys. 20 820–831, 1987.
    • (1987) J. Phys. D: AppL Phys , vol.20 , pp. 820-831
    • Cox, T.I.1
  • 56
    • 84957279418 scopus 로고
    • Measurements of time-varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge
    • J. L. Wilson, J. B. O. Caughman II, L. Nguyen, and D. N. Ruzic, “Measurements of time-varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge,” J. Vac. Sci. Technol. A7 972–976, 1989.
    • (1989) J. Vac. Sci. Technol , vol.A7 , pp. 972-976
    • Wilson, J.L.1    Caughman Ii, J.B.O.2    Nguyen, L.3    Ruzic, D.N.4
  • 57
    • 0001435610 scopus 로고
    • A tuned Langmuir probe for measurements in RF glow discharges
    • A. Paranjpe, J. McVittie, and S. A. Self, “A tuned Langmuir probe for measurements in RF glow discharges,” J. Appl. Phys. 67 11, 6718–6727, 1990.
    • (1990) J. Appl. Phys , vol.67 , Issue.11 , pp. 6718-6727
    • Paranjpe, A.1    Mcvittie, J.2    Self, S.A.3
  • 58
    • 36849111467 scopus 로고
    • Plasma diagnostics and energy transport of a dc discharge used for sputtering
    • D. J. Ball, “Plasma diagnostics and energy transport of a dc discharge used for sputtering,” J. Appl. Phys. 43 7 3047–3056, 1972.
    • (1972) J. Appl. Phys , vol.43 , Issue.7 , pp. 3047-3056
    • Ball, D.J.1
  • 59
    • 0000160202 scopus 로고
    • Electron temperature and density diagnostics in a helium glow discharge
    • E. A. Den Hartog, T. R. O’Brian, and J. E. Lawler, “Electron temperature and density diagnostics in a helium glow discharge,” Phys. Rev. Lett. 62 1500–1503, 1989.
    • (1989) Phys. Rev. Lett , vol.62 , pp. 1500-1503
    • Den Hartog, E.A.1    O’Brian, T.R.2    Lawler, J.E.3
  • 60
    • 84956076630 scopus 로고
    • Time-resolved electron energy distribution function measurements in a low-frequency frequency RF glow discharge
    • M. B. Hopkins, C. A. Anderson, and W. G. Graham, “Time-resolved electron energy distribution function measurements in a low-frequency frequency RF glow discharge,” Europhys. Lett. 8 2 141–145, 1989.
    • (1989) Europhys. Lett , vol.8 , Issue.2 , pp. 141-145
    • Hopkins, M.B.1    Anderson, C.A.2    Graham, W.G.3
  • 61
    • 0043100946 scopus 로고
    • An experimental study of a parallel-plate radio-frequency discharge: Measurements of the radiation temperature and electron density
    • G. A. Hebner, J. T. Verdeyen, and M. J. Kushner, “An experimental study of a parallel-plate radio-frequency discharge: Measurements of the radiation temperature and electron density,” J. Appl. Phys., vol. 63, no. 7, pp. 2226-2236, 1988.
    • (1988) J. Appl. Phys , vol.63 , Issue.7 , pp. 2226-2236
    • Hebner, G.A.1    Verdeyen, J.T.2    Kushner, M.J.3
  • 62
    • 84891325268 scopus 로고
    • Electron energy distribution in a low pressure RF discharge plasma in xenon
    • A. P. Eshov and A. A. Kuzovnikov, “Electron energy distribution in a low pressure RF discharge plasma in xenon,” Sov. J. Plasma Phys., vol. 11, no. 5, pp. 361-363, 1985.
    • (1985) Sov. J. Plasma Phys , vol.11 , Issue.5 , pp. 361-363
    • Eshov, A.P.1    Kuzovnikov, A.A.2
  • 63
    • 84941469932 scopus 로고
    • On the presence of fast electrons in RF discharges: Langmuir probe measurements
    • presented at the XIX Int. J. M. Labat Ed.
    • G. Dilecce, S. De Benedictis, M. Capitelli, and C. Gorse, “On the presence of fast electrons in RF discharges: Langmuir probe measurements,” presented at the XIX Int. Conf. Phenomena in Ionized Gases, Belgrade, 1989, J. M. Labat, Ed.
    • (1989) Conf. Phenomena in Ionized Gases, Belgrade
    • Dilecce, G.1    De Benedictis, S.2    Capitelli, M.3    Gorse, C.4
  • 64
    • 0024879422 scopus 로고    scopus 로고
    • Computer simulation of materials processing plasma discharges
    • Solid State Mater. Sci.
    • L. E. Kline and M. J. Kushner, “Computer simulation of materials processing plasma discharges,” Solid State Mater. Sci., vol. 16, no. 1, pp. 1-35, 1989
    • , vol.16 , Issue.1 , pp. 1-35
    • Kline, L.E.1    Kushner, M.J.2
  • 65
    • 0000393088 scopus 로고
    • Structured ion energy distribution in radiofrequency glow-discharge systems
    • Ch. Wild and P. Koidl, “Structured ion energy distribution in radiofrequency glow-discharge systems,” Appl. Phys. Lett., vol. 54, no. 6, pp. 505-507, 1989.
    • (1989) Appl. Phys. Lett , vol.54 , Issue.6 , pp. 505-507
    • Wild, C.1    Koidl, P.2
  • 66
    • 36549099421 scopus 로고
    • Distribution of ion energies incident on electrodes in capacitively coupled RF discharges
    • M. J. Kushner, “Distribution of ion energies incident on electrodes in capacitively coupled RF discharges,” J. Appl. Phys., vol. 58, no. 11, pp. 4024-4031, 1985.
    • (1985) J. Appl. Phys , vol.58 , Issue.11 , pp. 4024-4031
    • Kushner, M.J.1
  • 67
    • 36549092475 scopus 로고
    • Monte Carlo simulation of ion transport through RF glow-discharge sheaths
    • B.E. Thompson, H.H. Sawin, and D.A. Fisher, “Monte Carlo simulation of ion transport through RF glow-discharge sheaths,” J. Appl. Phys., vol. 63, no. 7, pp. 2241-2251, 1988.
    • (1988) J. Appl. Phys , vol.63 , Issue.7 , pp. 2241-2251
    • Thompson, B.E.1    Sawin, H.H.2    Fisher, D.A.3
  • 68
    • 0000528150 scopus 로고
    • Ion bombardment in RF discharges
    • J. Liu, G.L. Huppert, and H.H. Sawin, “Ion bombardment in RF discharges,” J. Appl. Phys., vol. 68, no. 8, pp. 3916-3934, 1990.
    • (1990) J. Appl. Phys , vol.68 , Issue.8 , pp. 3916-3934
    • Liu, J.1    Huppert, G.L.2    Sawin, H.H.3
  • 69
    • 84941445206 scopus 로고
    • Measurement of the electrical characteristics of a symmetric RF discharge in argon
    • Palo Alto, CA
    • R. B. Piejak and V. A. Godyak, “Measurement of the electrical characteristics of a symmetric RF discharge in argon,” presented at the 42nd Ann. Gaseous Electron. Conf., Palo Alto, CA, 1989.
    • (1989) presented at the 42nd Ann. Gaseous Electron. Conf
    • Piejak, R.B.1    Godyak, V.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.