Solid-state nuclear magnetic resonance spectroscopy of low dielectric constant films from pulsed hydrofluorocarbon plasmas

Journal of the Electrochemical Society

Volumn 146, Issue 7, 1999, Pages 2652-2658

  Lau, Kenneth K S ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC HYDROCARBONS; CHEMICAL BONDS; DESORPTION; FLUOROCARBONS; MOLECULAR STRUCTURE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PYROLYSIS;

SOLID STATE NUCLEAR MAGNETIC RESONANCE (NMR) SPECTROSCOPY;

DIELECTRIC FILMS;

EID: 0032651560     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391987     Document Type: Article

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