High-resolution 19F MAS NMR spectroscopy of fluorocarbon films from pulsed PECVD of hexafluoropropylene oxide

Journal of Physical Chemistry B

Volumn 102, Issue 31, 1998, Pages 5977-5984

  Lau, Kenneth K S ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038499172     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp981240s     Document Type: Article

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