Fluorocarbon film for protection from alkaline etchant and elimination of in-use stiction

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 695-698

  Matsumoto, Yoshinori ^a   Yoshida, Kazumasa ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; FLUORINE COMPOUNDS; FLUOROCARBONS; MICROMACHINING; POLYMERIZATION; PROTECTIVE COATINGS; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

CYCLIZED PERFLUOROPOLYMERS (CPFP); FLOUROCARBON FILMS;

MICROELECTRONIC PROCESSING;

EID: 0030702416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)