A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 308-314

  Matsumoto, Yoshinori ^a   Yoshida, Kazumasa ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

CYTOP; Fluorocarbon film; In use stiction; Integrated sensors; Plasma polymerization

Indexed keywords

DEPOSITION; ETCHING; FLUORINE CONTAINING POLYMERS; FLUOROCARBONS; MICROMACHINING; PLASMA APPLICATIONS; PLASTIC FILMS; POLYMERIZATION; SENSORS; THERMODYNAMIC STABILITY;

CYCLIZED PERFLUORO POLYMER (CPFP); IN USE STICTION; INTEGRATED SENSORS; PLASMA POLYMERIZATION;

ACCELEROMETERS;

EID: 0032050192     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01763-9     Document Type: Article

References (16)

1. Y. Matsumoto, M. Esashi, An integrated capacitive absolute pressure sensor, Electronics and Communications in Japan, Part 2, Vol. 76, No. 1, 1993, pp. 93-106.
2. Y. Matsumoto, M. Esashi, Integrated silicon capacitive accelerometer with PLL servo technique, Sensors and Actuators A 39 (1993) 209-217.
3. H. Takao, Y. Matsumoto, M. Ishida, A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers, Tech. Digest, 9th Int. Conference Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, 16-19 June, 1997, pp. 1173-1176.
4. M. Nakamura, M. Unoki, K. Aosaki, S. Yokotsuka, Cyclized perfluoropolymer (CPFP) a low k dielectric for microelectronics device, Proc. IMC 1992, Yokohama, Japan, 1992, pp. 76-80.
5. CYTOP Technical Report, Asahi Glass Company, Japan.
6. M.R. Houston, R. Maboudian, R.T. How, Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1996, pp. 42-47.
7. H.V. Jansen, J.G.E. Gardeniers, J. Elders, H.A.C. Tilmans, M. Elwenspoek, Applications of fluorocarbon polymers in micromechanics and micromachining, Sensors and Actuators A 41-42 (1994) 136-140.
8. F. Kozlowski, N. Lindmair, Th. Scheiter, C. Hierold, W. Lang, A novel method to avoid sticking of surface-micromachined structure, Sensors and Actuators A 54 (1996) 659-662.
9. P.F. Mann, B.P. Gogoi, C.H. Mastrangelo, Elimination of post-release adhesion in microstructures using thin conformal fluorocarbon coatings, J. Microelectromech. Syst. 6 (1997) 25-34.
10. D.-F. O'Kane, D.W. Rice, Preparation and characterization of glow discharge fluorocarbon-type polymers, J. Macromol. Chem. A 10 (1976) 567-577.
11. H. Yasuda, Plasma Polymerization, Academic Press, New York, 1985.
12. 2 mixtures, J. Appl. Phys. 61 (1987) 2754-2762.
13. D.T. Clark, D. Shuttleworth, Plasma polymerization. II. An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasma in perfluorobenzene and perfluorocyclohexane, J. Polymer Sci.: Polymer Chem. Edn. 18 (1980) 27-46.
14. Y. Hikosaka, H. Sudai, Radical kinetics in a fluorocarbon etching plasma, Jpn. J. Appl. Phys. 32 (1993) 3040-3044.
15. Y. Matsumoto, M. Iwakiri, H. Tanaka, M. Ishida, T. Nakamura, A capacitive accelerometer using SDB-SOI structure, Sensors and Actuators A 53 (1996) 267-272.
16. M. Nishimura, Y. Matsumoto, M. Ishida, The method to prevent stiction in a capacitive accelerometer using SDB-SOI structure, Tech. Digest, 15th Sensor Symp., Kawasaki, Japan, 3-4 June, 1997, pp. 205-208.