Metal stack etching using a helical resonator plasma

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2574-2581

  Labelle, C B ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001554616     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588770     Document Type: Article

References (20)

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