On the radial distribution and nonambipolarity of charged particle fluxes in a nonmagnetized planar inductively coupled plasma

Journal of Applied Physics

Volumn 80, Issue 12, 1996, Pages 6639-6645

  Mumken G ^a   Kortshagen, U ^a,b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CHARGED PARTICLES; CONDUCTIVE MATERIALS; CURRENT DENSITY; ELECTRIC CURRENT MEASUREMENT; ELECTRIC DISCHARGES; ELECTRONS; ELECTROSTATIC DEVICES; IONS; KINETIC THEORY; MATHEMATICAL MODELS;

CHARGED PARTICLE FLUXES; CONDUCTING WALLS; ELECTRON FLUXES; ELECTROSTATIC PROBE ARRAYS; ION ENERGY ANALYZER ARRAY; ION ENERGY DISTRIBUTION; ION FLUXES; NONAMBIPOLARITY; PLANAR INDUCTIVELY COUPLED PLASMA;

SEMICONDUCTOR PLASMAS;

EID: 0344336302     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363786     Document Type: Article

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