Sacrificial aluminum etching for CMOS microstructures

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 523-528

  Paul, O ^a   Westberg, D ^a   Hornung, M ^a   Ziebart, V ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ETCHING; FORCE MEASUREMENT; INTEGRATED CIRCUIT MANUFACTURE; MASKS; MICROMACHINING; PRESSURE MEASUREMENT; THIN FILMS;

SACRIFICIAL ALUMINUM ETCHING (SALE);

CMOS INTEGRATED CIRCUITS;

EID: 0030651936     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)