A silicon thermocapacitive flow sensor with frequency modulated output

Sensors and Actuators, A: Physical

Volumn 57, Issue 1, 1996, Pages 35-39

  Kwok, Chee Yee ^a   Lin, Kwang Ming ^a   Huang, Ruey Shing ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Flow sensors; Strontium titanate; Thermocapacitive

Indexed keywords

FLOW SENSORS; FREQUENCY MODULATED OUTPUT; GAS FLOW VELOCITY; OSCILLATION FREQUENCY; STRONTIUM TITANATE;

ETCHING; FLOW MEASUREMENT; FREQUENCY MODULATION; INTEGRATED CIRCUITS; MOS DEVICES; NATURAL FREQUENCIES; PERMITTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; STRONTIUM COMPOUNDS; THERMAL EFFECTS; VELOCITY;

SILICON SENSORS;

EID: 0030262990     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80092-1     Document Type: Article

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