Microheating elements in CMOS technology

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 1996, Pages 5-8

  Gaitan, Michael ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ETCHING; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES; TEMPERATURE CONTROL;

ANISOTROPIC CHEMICAL ETCH; CMOS TECHNOLOGY; MICROHEATING ELEMENTS; MINIATURIZATION; MONOLITHIC CIRCUIT INTEGRATION; TEMPERATURE PROGRAMMABLE SURFACE;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029708022     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)