An integrated thermo-capacitive type MOS flow sensor

IEEE Electron Device Letters

Volumn 17, Issue 5, 1996, Pages 247-249

  Lin, Kwang Ming ^b   Kwok, Cheeyee ^a,b   Huang, Rucy Shing ^b  

^a IEEE

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FLOATING GATE TRANSISTOR; FLOW SENSOR; FLOW VELOCITY; TANTALUM PENTOXIDE; THERMOCAPACITIVE INTEGRATED FLOW SENSOR;

BORON; CAPACITANCE; CAPACITORS; DIELECTRIC MATERIALS; FLOW MEASUREMENT; GATES (TRANSISTOR); MICROMACHINING; MOSFET DEVICES; PERMITTIVITY; TANTALUM COMPOUNDS; TEMPERATURE; TRANSCONDUCTANCE;

SENSORS;

EID: 0030150133     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.491844     Document Type: Article

References (7)

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