Chemical performance and high temperature characterization of micromachined chemical reactors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 163-166

  Srinivasan, R ^a   Firebaugh, S L ^a   Hsing, I M ^a   Ryley, J ^a   Harold, M P ^a   Jensen, K F ^a   Schmidt, M A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH TEMPERATURE APPLICATIONS; MICROMACHINING; OXIDATION;

MICROMACHINED CHEMICAL REACTORS;

CHEMICAL REACTORS;

EID: 0030674943     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)