Chemical vapor deposition of electroceramic thin films

MRS Bulletin

Volumn 21, Issue 6, 1996, Pages 37-43

  De Keijser, M ^a   Dormans, G J M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003361740     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400046066     Document Type: Article

References (12)

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2. See for example, L.A. Wills, W.A. Feil, B.W. Wessels, L.M. Tonge, and T.J. Marks, J. Cryst. Growth 107 (1991) p. 712.
3. c superconductors, see for example, High Temperature Superconductors: Fundamental Properties and Novel Materials Processing, edited by D. Christen, J. Narayan, and L. Schneemeyer (Mater. Res. Soc. Symp. Proc. 169, Pittsburgh, 1990).
4. 3, see for example, T. Kawahara, M. Yamamuka, T. Makita, J. Naka, A. Yuuki, N. Mikami, and K. Ono, Jpn. J. Appl. Phys. 33 (1994) p. 5129.
5. 4, see for example, J. Zhang, G.T. Stauf, R. Gardiner, P. Van Buskirk, and J. Steinbeck, J. Mater. Res. 9 (1994) p. 1333.
6. P. Kirlin, S. Bilodeau, and P. Van Buskirk, Integrated Ferroelectrics 7 (1995) p. 307.
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8. M. Okada and K. Tomita, U.S. Patent No. 4,792,463 (1988).
9. J.L. Vossen and W. Kern, eds., Thin Film Processes (Academic Press, New York, 1978).
10. L.D. McMillan, T.L. Roberts, M.C. Scott, and C.A. Paz de Araujo, in Proc. 4th Int. Symp. Integrated Ferroelectrics (Monterey, 1992) p. 666.
11. M. de Keijser, P.J. van Veldhoven, and G.J.M. Dormans, in Ferroelectric Thin Films III, edited by E.R. Myers, B.A. Tuttle, S.B. Desu, and P.K. Larsen (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, 1993) p. 223.
12. G.J.M. Dormans, P.J. van Veldhoven, and M. de Keijser, J. Cryst. Growth 123 (1992) p. 537.