Processing of sol-gel derived PZT coatings on non-planar substrates

Journal of Micromechanics and Microengineering

Volumn 6, Issue 3, 1996, Pages 291-300

  Cooney, T G ^a   Francis, L F ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; CRACK INITIATION; DELAMINATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAD COMPOUNDS; MULTILAYERS; SOL-GELS; SUBSTRATES; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION ANALYSIS;

LEAD ZIRCONATE TITANATE (PZT) COATINGS; MULTILAYER DEPOSITION; SPIN COATING;

CERAMIC COATINGS;

EID: 0030230642     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/3/001     Document Type: Article

References (35)

1. Jaffe B, Cook W R and Jaffe H 1971 Piezoelectric Ceramics (Marietta, OH: R A N)
2. Sayer M, Vasant Kumar C V R, Barrow D, Zou L and Amm D T 1992 Integrated piezoelectric and pyroelectric devices from thin film ferroelectrics Proc. Mater. Res. Soc. (Ferroelectrics Thin Films II) (Boston, MA, 1994) pp 39-48
3. Murait P, Kohli M, Maeder T, Kholkin A, Brooks K, Setter N and Luthier R 1995 Fabrication and characterization of PZT thin-film vibrators for micromotors Sensors Actuators A 48 157-65
4. Flynn A M, Tavrow L S, Bart S F, Brooks R A, Ehrlich D H, Udayakumar K R and Cross L E 1992 Piezoelectric micromotors for microrobots J. Microelectromech. Syst. 1 44-51
5. 3 thin films for microsensor applications Sensors Actuators A 35 77-83
6. Hsueh C-C, Tamagawa T, Ye C, Helgeson A and Polla D L 1993 Sol-gel derived ferroelectric thin films in silicon micromachining Integrated Ferroelectrics 3 21-32
7. Polla D L 1995 Microelectromechanical systems based on ferroelectric thin films Microelectron. Eng. 29 51-8
8. Polla D L 1992 Ferroelectric microsensors and microactuators Proc. Eighth IEEE Int Symp. Applications of Ferroelectrics (Yokohama, Japan, 1994) pp 127-33
9. Robbins W P, Polla D L, Tamagawa T, Glumac D E and Tjhen W 1991 Designs of linear motion microactuators using piezoelectric thin films J. Micromech. Microeng. 1 247-52
10. Glumac D E, Cooney T G, Francis L F and Robbins W P 1995 A theoretical examination of MEMS microactuator responses with an emphasis on materials and fabrication Proc. Mater. Res. Soc. (Ferroelectric Thin Films IV) (Boston, MA, 1994) pp 395-400
11. Cooney T G, Glumac D E, Robbins W P and Francis L F 1995 An experimental examination of MEMS microactuator material issues Proc. Mater. Res. Soc. (Ferroelectric Thin Films IV) (Boston, MA, 1994) pp 401-6
12. See for example: Schwartz R W, Boyle T J, Lockwood S J, Sinclair M B, Dimos D and Buchheit C D 1995 Sol-gel processing of PZT thin films: a review of the state of the art and process optimization strategies Integrated Ferroelectrics 7 259-78
13. Aegerter M A 1992 Ferroelectric thin coatings J. Non-Cryst. Solids 151 195-202
14. Garino T and Harrington M 1990 Residual stress in PZT thin films and its effect on ferroelectric properties Proc. Mater. Res. Soc. (Ferroelectric Thin Films II) (Boston, MA, 1989) pp 341-7
15. Glumac D E 1995 Linear displacement microactuators utilizing piezoelectric thin film PhD Thesis University of Minnesota, USA
16. 3, PZT, and PLZT thin films Brit. Ceram. Proc. 36 107-21
17. Lakeman C D E and Payne D A 1992 Processing effects in the sol-gel preparation of PZT dried gels, powders and ferroelectric thin layers J. Am. Ceram. Soc. 75 3091-6
18. Brinker C J, Hurd A J, Schunk P R, Frye G C and Ashley C S 1992 Review of sol-gel thin film formation J. Non-Cryst. Solids 147&148 424-36
19. Francis L F 1996 Sol-gel methods for oxide coating Intermetallic and Ceramic Coatings ed T Sudarshan and N Dahotre (New York: Dekker) at press
20. Bornside D E, Macosko C W and Scriven L E 1987 On modeling of spin coating J. Imaging Tech. 13 122-9
21. Brinker C J and Scherer G W 1990 Sol-Gel Science (New York: Academic)
22. Croll S G 1979 Internal strain in solvent-cast coatings J. Coatings Technol. 51 64-8
23. Tuttle B A, Schwartz R W, Doughty D H and Voigt J A 1990 Characterization of chemically prepared PZT thin films Proc. Mater. Res. Soc. (Ferroelectric Thin Films) (San Francisco, CA, 1990) pp 159-65
24. Dana S S, Etzold K F and Clabes 1991 Crystallization of sol-gel derived lead zirconate titanate thin films J. Appl. Phys. 69 167-74
25. Carim A H, Tuttle B A, Doughty D H and Martinez S L 1991 Microstructure of solution-processed lead zirconate titanate (PZT) thin films J. Am. Ceram. Soc. 74 1455-8
26. Peurrung L M and Graves D B 1993 Spin coating over topography IEEE Trans. Semicon. Man. 72 58-64
27. Yonkoski R K and Sloane D S 1992 Model for spin coating in microelectronic applications J. Appl. Phys. 72 48-54
28. Stillwagon L E and Larson R G 1990 Leveling of thin films over uneven substrates during spin coating Phys. Fluids A 2 1937-44
29. Stillwagon L E and Larson R G 1992 Planarization during spin coating Phys. Fluids A 4 895-903
30. Bornside D E 1990 Mechanism for the local planarization of microscopically rough surfaces by drying thin films of spin-coated polymer/solvent solutions J. Electrochem. Soc. 137 2589-95
31. Cooney T G, Hachfeld E A and Francis L F 1995 Role of macrodefects in PZT thin films for microelectromechanical systems Proc. Int. Symp. Ferroelectric Thin Films (PAC RIM Meeting) (Honolulu, HI, 1993) pp 197-203
32. Scherer G W 1990 Effects of inclusions on shrinkage Proc. Mater. Res. Soc. (Better Ceramics Through Chemistry IV) (San Francisco, CA, 1990) pp 503-14
33. Bornside D E and Brown R A 1991 Global planarization of spun-on thin films by reflow Appl. Phys. Lett. 58 1181-3
34. Tam S Y, Scriven L E and Stolarski H K 1994 Stress effects in drying polymer films Proc. Mater. Res. Soc. (Thin Films: Stresses and Mechanical Properties IV) (Boston, MA, 1994) pp 529-35
35. Schiller P, Ye C, Tamagawa T and Polla D L 1992 Design and process considerations for ferroelectric film-based piezoelectric pressure sensors 4th Int. Symp. Integrated Ferroelectrics (Monterey, CA, 1992)