Processing of sol-gel derived PZT coatings on non-planar substrates

Journal of Micromechanics and Microengineering

Volumn 6, Issue 3, 1996, Pages 291-300

  Cooney, T G ^a   Francis, L F ^a  

^a University of Minnesota ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; CRACK INITIATION; DELAMINATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAD COMPOUNDS; MULTILAYERS; SOL-GELS; SUBSTRATES; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION ANALYSIS;

LEAD ZIRCONATE TITANATE (PZT) COATINGS; MULTILAYER DEPOSITION; SPIN COATING;

CERAMIC COATINGS;

EID: 0030230642     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/3/001     Document Type: Article

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