Integrated decoupling capacitors using Pb(Zr,Ti)O3 thin films

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 305-316

  Dimos, D ^a   Lockwood, S J ^a   Garino, T J ^a   Al Shareef, H N ^a   Schwartz, R W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COST EFFECTIVENESS; DIELECTRIC FILMS; FABRICATION; LEAD COMPOUNDS; SURFACE MOUNT TECHNOLOGY; THIN FILM DEVICES;

CHEMICAL SOLUTION DEPOSITION; THIN FILM DECOUPLING CAPACITORS;

FERROELECTRIC DEVICES;

EID: 0030389543     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-305     Document Type: Conference Paper

References (18)