Sputter synthesis of ferroelectric films and heterostructures

MRS Bulletin

Volumn 21, Issue 6, 1996, Pages 25-30

  Auciello, O ^a   Kingon, A I ^a   Krupanidhi, S B ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYSTALLIZATION; FERROELECTRIC MATERIALS; HETEROJUNCTIONS; ION BOMBARDMENT; MAGNETRON SPUTTERING; MICROSTRUCTURE; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SUPERLATTICES; THIN FILMS;

FERROELECTRIC FILMS; SPUTTER SYNTHESIS;

SYNTHESIS (CHEMICAL);

EID: 0030165695     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400046042     Document Type: Article

References (31)

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