Vertical-cavity surface emitting lasers: Moving from research to manufacturing

Proceedings of the IEEE

Volumn 85, Issue 11, 1997, Pages 1730-1739

  Croquette, Kent D ^a   Hou, Hong Q ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Materials processing; Materials science and technology; Optoelectronic devices; Semiconductor device fabrication; Semiconductor lasers

Indexed keywords

CAVITY RESONATORS; EPITAXIAL GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; MIRRORS; OPTOELECTRONIC DEVICES; OXIDATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

DISTRIBUTED BRAGG REFLECTOR MIRRORS; MATERIALS PROCESSING; VERTICAL CAVITY SURFACE EMITTING LASERS; WET OXIDATION;

SEMICONDUCTOR LASERS;

EID: 0031275596     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.649649     Document Type: Article

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