Vertical cavity lasers with tapered oxide apertures for low scattering loss

Electronics Letters

Volumn 33, Issue 10, 1997, Pages 869-871

  Hegblom, E R ^a   Thibeault, B J ^a   Naone, R L ^a   Coldren, L A ^a  

^a NONE

Author keywords

Semiconductor junction lasers; Vertical cavity surface emitting lasers

Indexed keywords

LENSES; LIGHT MODULATION; OXIDATION; OXIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR JUNCTIONS;

SEMICONDUCTOR JUNCTION LASERS; VERTICAL CAVITY SURFACES EMITTING LASERS;

SEMICONDUCTOR LASERS;

EID: 0031559338     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970610     Document Type: Article

References (15)

1. HEGBLOM, E.R., BABIC, D.I., THIBEAULT, B.J., and COLDREN, L.A.: 'Estimation of scattering losses in dielectrically apertured vertical cavity lasers', Appl. Phys. Lett., 1996, 68, (13), pp. 1757-1759
2. HEGBLOM, E.R., BASIC, D.I., THIBEAULT, B.J., and COLDREN, L.A.: 'Scattering losses from dielectric apertures in vertical cavity lasers', IEEE J. Sel. Top. Quantum Electron., 1997, 3, (2)
3. THIBEAULT, B.J., HEGBLOM, E.R., FLOYD, P.D., NAONE, R., AKULOVA, Y., and COLDREN, L.A.: 'Reduced optical scattering loss in vertical-cavity lasers using a thin (300Å) oxide aperture', IEEE Photonics Technol. Lett., 1996, 8, (5), pp. 593-596
4. CHOQUETTE, K.D., CHOW, W.W., HADLEY, G.R., HOU, H.Q., and GEIB, K.M.: 'Properties of small-aperture selectively oxidised VCSELs'. IEEE LEOS 1996, Boston, MA, 1996
5. HADLEY, G.R.: 'Optical modeling of vertical cavity surface emitting lasers'. IEEE LEOS '96, Boston, MA, 1996
6. COLDREN, L.A., THIBEAULT, B.J., HEGBLOM, E.R., THOMPSON, G.B., and SCOTT, J.W.: 'Dielectric apertures as intracavity lenses in vertical cavity lasers', Appl. Phys. Lett., 1996, 68, (3), pp. 313-315
7. THIBEAULT, B.J., BERTILSSON, K., HEGBLOM, E.R., STRZELECKA, E.M., AKULOVA, Y., and COLDREN, L.A.: 'High speed characteristics of low optical loss oxide apertured vertical cavity lasers', IEEE Photonics Technol. Lett., 1997, 9, (1), pp. 11-13
8. CHOQUETTE, K.D., SCHNEIDER, R.P., LEAR, K.L., and GEIB, K.M.: 'Low threshold voltage vertical-cavity lasers fabricated by selective oxidation', Electron. Lett., 1994, 30, (24), pp. 2043-2044
9. NAONE, R.L., HEGBLOM, E.R., THIBEAULT, B.J., and COLDREN, L.A.: 'Oxidation of AlGaAs for tapered apertures in vertical cavity lasers', Electron. Lett., 1997, 33, (4), pp. 300-301
10. TWESTEN, R.D., FOLLSTAEDT, D.M., CHOQUETTE, K.D., and SCHNEIDER, R.P.: 'Microstructure of laterally oxidized AlGaAs in vertical cavity lasers', Appl. Phys. Lett., 1996, 69, (1), pp. 19-21
11. NAONE, R.L., and COLDREN, L.A.: 'Surface energy model for the thickness dependence of the lateral oxidation of AlAs', submitted to J. Appl. Phys., 1997
12. PETERS, M.G., THIBEAULT, B.J., YOUNG, D.B., GOSSARD, A.C., and COLDREN, L.A.: 'Growth of beryllium doped Al/sub x/Ga/sub 1-x/ As/GaAs mirrors for vertical-cavity surface-emitting lasers', J. Vac. Sci. Technol. B, 1994, 12, (6), pp. 3075-3083
13. DALLESASSE, J.M., HOLONYAK, N., SUGG, A.R., RICHARD, T.A., and ELZEIN, N.: 'Hydolization oxidation of AlGaAs-AlAs-GaAs quantum well heterostructures and superlattices', Appl. Phys. Lett., 1990, 57, pp. 2844-2846
14. THIBEAULT, B.J., STRAND, T.A., WIPIEJEWSKI, T., PETERS, M.G., YOUNG, D.B., CORZINE, S.W., COLDREN, L.A., and SCOTT, J.W.: 'Evaluating the effects of optical and carrier losses in etched post vertical cavity lasers', J. Appl. Phys., 1995, 78, (10), pp. 5871-5876
15. FLOYD, P.D., THIBEAULT, B.J., HEGBLOM, E.R., KO, J., and COLDREN, L.A.: 'Comparison of optical losses in dielectric apertured vertical-cavity lasers', IEEE Photonics Technol. Lett., 1996, 8, (5), pp. 590-592