Direct simulation Monte Carlo of inductively coupled plasma and comparison with experiments

Journal of the Electrochemical Society

Volumn 144, Issue 7, 1997, Pages 2448-2455

  Johannes, Justine ^a,c   Bartel, Timothy ^a   Hebner, Gregory A ^a   Woodworth, Joseph ^a   Economou, Demetre J ^b,c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of Houston   (United States)

^c ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; COMPUTER SIMULATION; ION BOMBARDMENT; MONTE CARLO METHODS; PLASMA DENSITY;

INDUCTIVELY COUPLED PLASMA; SELF CONSISTENT CONTINUUM PLASMA CODE;

PLASMA DEVICES;

EID: 0031186974     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837835     Document Type: Article

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