Rapid two-dimensional self-consistent simulation of inductively coupled plasma and comparison with experimental data

Applied Physics Letters

Volumn 68, Issue 18, 1996, Pages 2499-2501

  Wise, Richard S ^a   Lymberopoulos, Dimitris P ^a   Economou, Demetre J ^a  

^a University of Houston   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000876565     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115834     Document Type: Review

References (19)

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