|
|
|
Volumn , Issue , 1991, Pages 659-662
|
|
Micromechanical electrostatic voltmeter
a
a
NONE
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ELECTRODES;
ELECTROSTATIC DEVICES;
ELECTROSTATIC COMB DRIVES;
ELECTROSTATIC VOLTMETER;
POLYSILICON MICROSHUTTER;
REMOTE VOLTAGE MONITORING;
SILICON SUBSTRATE;
VOLTMETERS;
|
|
EID: 0026372877
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (32)
|
|
References (8)
|
