Actuation of polysilicon surface-micromachined mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 53-59

  Tien, Norman C ^a   Kiang, Meng Hsiung ^a   Daneman, Michael J ^a   Solgaard, Olav ^a   Lau, Kam Y ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC COMB-DRIVE ACTUATORS; LINEAR VIBROMOTERS; POLYSILICON SURFACE-MICROMACHINED ACTUATORS;

ACTUATORS; CRYSTALLINE MATERIALS; ELECTROSTATIC DEVICES; LINEAR MOTORS; MICROMACHINING; SILICON;

MIRRORS;

EID: 0029717163     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)