Phase-shifting point diffraction interferometer

Optics Letters

Volumn 21, Issue 19, 1996, Pages 1526-1528

  Medecki, H ^a   Tejnil, E ^b   Goldberg, K A ^a,c   Bokor, J ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ALGORITHMS; DIFFRACTION; DIFFRACTION GRATINGS; OPTICAL BEAM SPLITTERS; PHASE SHIFT; PHOTOLITHOGRAPHY; POLYNOMIALS; WAVEFRONTS;

EXTREME ULTRAVIOLET PROJECTION LITHOGRAPHY; PHASE SHIFTING INTERFEROMETRY; POINT DIFFRACTION INTERFEROMETER; RELAY OPTIC; WAVEFRONT MEASUREMENT; WAVELENGTH;

INTERFEROMETERS;

EID: 0030257954     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.21.001526     Document Type: Article

References (8)

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