Catalyst enhanced chemical vapor deposition: Effects on chemical vapor deposition temperature and film purity

Journal of the American Chemical Society

Volumn 119, Issue 39, 1997, Pages 9295-9296

  Zhang, Y ^a   Choi, W K ^a   Puddephatt, R J ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; CATALYSIS; PRECIPITATION; TECHNIQUE; TEMPERATURE; VAPOR;

EID: 0030827059     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja971588l     Document Type: Article

References (10)