Strain-modulated epitaxy: Modification of growth kinetics via patterned, compliant substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2170-2174

  Carter Coman, Carrie ^a   Brown, April S ^a   Bicknell Tassius, Robert ^a,b   Jokerst, Nan Marie ^a   Fournier, Françoise ^a   Dawson, Douglas E ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA TECH RESEARCH INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544273827     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588892     Document Type: Article

References (17)

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