Twist wafer bonded "fixed-film" versus "compliant" substrates: Correlated misfit dislocation generation and contaminant gettering

Applied Physics A: Materials Science and Processing

Volumn 64, Issue 6, 1997, Pages 631-633

  Tan, T Y ^a   Gosele U ^b  

^a Duke University   (United States)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); IMPURITIES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; STACKING FAULTS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CONTAMINANT GETTERING; FIXED FILM SUBSTRATE; HIGH QUALITY HETERO EPITAXIAL FILM; MISFIT DISLOCATION; SCREW DISLOCATION; THREADING DISLOCATION;

SEMICONDUCTING FILMS;

EID: 0031170029     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050530     Document Type: Article

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