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Volumn 25, Issue 3, 2002, Pages 269-280

Structure and mechanical properties of low stress tetrahedral amorphous carbon films prepared by pulsed laser deposition

(6) Bonelli, M a Ferrari, A C b Fioravanti, A c Li Bassi, A c Miotello, A a Ossi, P M c

a UNIVERSITY OF TRENTO (Italy)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

c POLITECNICO DI MILANO (Italy)

Author keywords

62.20.Qp tribology and hardness; 68.60. p physical properties of thin films, nonelectronic; 78.30.Ly disordered solids; 81.15Fg laser deposition

Indexed keywords

EID: 0001624181 PISSN: 14346028 EISSN: None Source Type: Journal
DOI: 10.1007/s10051-002-8919-y Document Type: Article

Times cited : (49)

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