Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition

Applied Surface Science

Volumn 96-98, Issue , 1996, Pages 859-865

  Puretzky, A A ^a   Geohegan, D B ^b   Jellison Jr , G E ^b   McGibbon, M M ^c  

^a INSTITUTE OF SPECTROSCOPY   (Russian Federation)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELLIPSOMETRY; EMISSION SPECTROSCOPY; EXCIMER LASERS; IMAGING TECHNIQUES; PULSED LASER APPLICATIONS; SODIUM CHLORIDE;

CARBON PLUME; DIAMOND LIKE CARBON FILM; ENERGY FLUENCE; ION PROBE DIAGNOSTICS; LASER IRRADIATION;

LASER PRODUCED PLASMAS;

EID: 0030562947     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00567-6     Document Type: Article

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