Pulsed laser deposition apparatus for applied research

Measurement Science and Technology

Volumn 10, Issue 3, 1999, Pages

  Bonelli, Marco ^a   Cestari, Claudio ^b   Miotello, Antonio ^a  

^a UNIVERSITY OF TRENTO   (Italy)

^b FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

Laser ablation; Thin film deposition

Indexed keywords

DEPOSITION; PULSED LASER APPLICATIONS; SUBSTRATES; THIN FILMS;

PULSED LASER DEPOSITION (PLD);

LASER ABLATION;

EID: 0033097641     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/3/024     Document Type: Article

References (4)

1. Chrisey D B and Hubler C K (eds) 1994 Pulsed Laser Deposition of Thin Films (Naval Research Laboratory, Washington DC) (New York: Wiley)
2. Miller J C and Haglund R F (eds) 1998 Laser Ablation and Deposition (San Diego, CA: Academic)
3. Miotello A, Kelly R, Braren B and Otis C E 1992 Novel geometrical effects observed in debris when polymers are laser sputtered Appl. Phys. Lett. 61 2784-6
4. Mele A, Giardini Guidoni A, Kelly R, Miotello A, Orlando S and Teghil R 1996 Spatial distribution of laser-ablated material by probing a plasma plume in three dimensions Appl Surf. Sci. 96-98 102-11