Strain measurement in thin pseudomorphic sige layers of submicron wires using raman spectroscopy

Solid-State Electronics

Volumn 40, Issue 1-8, 1996, Pages 307-310

  Dietrich, B ^a   Bugiel, E ^a   Frankenfeldt, H ^a   Harker, A H ^b   Jagdhold, U ^a   Tillack, B ^a   Wolff, A ^a  

^a IHP   (Germany)

^b RICARDO UK LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; EPITAXIAL GROWTH; ETCHING; FINITE ELEMENT METHOD; HETEROJUNCTIONS; LATTICE CONSTANTS; MATHEMATICAL MODELS; RAMAN SPECTROSCOPY; RELAXATION PROCESSES; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; STRAIN MEASUREMENT;

HETEROEPITAXIAL LAYERS; MICRO RAMAN MEASUREMENTS; RAMAN SHIFTS; SILICON GERMANIDE; SUBMICRON WIRES; THIN PSEUDOMORPHIC LAYER; TWO DIMENSIONAL FINITE ELEMENT PROGRAM;

SEMICONDUCTOR QUANTUM WIRES;

EID: 0029714478     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1101(95)00317-7     Document Type: Article

References (13)

1. E. Kasper and F. Schäffler, in Semiconductor and Semimetals, Vol. 33, p. 223. Academic Press, Boston (1991).
2. Y. S. Tang, C. D. W. Wilkinson, D. W. Smith, I. E. Whall and E. Parker, Jpn. J. Appl. Phys. 33, 2348 (1994).
3. Y. S. Tang, C. D. W. Wilkinson, C. M. Sotomayor-Torres, D. W. Smith, T. E. Whall and E. H. C. Parker, Solid St. Commun. 85, 199 (1993).
4. N. Usami, T. Mine, S. Fukatsu and Y. Shiraki, Appl. Phys. Lett. 63, 2789 (1993).
5. P. Ils, M. Michel, A. Forchel, I. Gyuro, M. Klenk and E. Zielinski, J. Vac. Sci. Technol. B11, 2584 (1989); A. Forchel, P. Ils, O. Schilling, R. Steffen, M. Michel, F. Kieseling and J. Oshinowo, in Proc. Int. Symp. Heterostructures in Science and Technology, p. 36, Würzburg (1995).
6. P. Ils, M. Michel, A. Forchel, I. Gyuro, M. Klenk and E. Zielinski, J. Vac. Sci. Technol. B11, 2584 (1989); A. Forchel, P. Ils, O. Schilling, R. Steffen, M. Michel, F. Kieseling and J. Oshinowo, in Proc. Int. Symp. Heterostructures in Science and Technology, p. 36, Würzburg (1995).
7. B. Dietrich, E. Bugiel, H. J. Osten and P. Zaumseil, J. Appl. Phys. 74, 7223 (1993).
8. J. Brunner, J. Nützel, M. Gail, U. Menczigar and G. Abstreiter, J. Vac. Sci. Technol. B11, 1097 (1993).
9. M. Arienzo, J. H. Comfort, E. F. Crabbe, D. L. Harame, S. S. Iyer, V. P. Kesan, B. S. Meyerson, G. I. Patton, J. M. Stork and Y.-S. Sun, Microelectron. Engng 19, 519 (1992).
10. S. C. Jain, B. Dietrich, H. Richter, A. Atkinson and A. H. Harker, Phys. Rev. B 52, 6247 (1995).
11. A. H. Harker, K. Pinardi, A. Atkinson and S. C. Jain, Phil. Mag. A 71, 871 (1995).
12. S. Sneddon and D. S. Berry, The classical theory of elasticity, in Handbuch der Physik (Edited by S. Flügge) Vol. VI, p. 1. Springer-Verlag, Berlin (1958).
13. E. Anastassakis, in Light Scattering in Semiconductor Structures and Superlattices (Edited by D. J. Lockwood and J. F. Young) NATO ASI Series B, Vol. 273, p. 173. Plenum Press, New York (1991).