Determination of unknown stress states in silicon wafers using microlaser Raman spectroscopy

Journal of Applied Physics

Volumn 82, Issue 5, 1997, Pages 2595-2602

  Narayanan, S ^a   Kalidindi, Surya R ^a   Schadler, Linda S ^b  

^a Drexel University   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; LIGHT POLARIZATION; LIGHT SCATTERING; MATHEMATICAL MODELS; MATHEMATICAL TRANSFORMATIONS; MATRIX ALGEBRA; RAMAN SPECTROSCOPY; STRESSES;

MICROLASER RAMAN SPECTROSCOPY; PLANE STRESS COMPONENTS;

SILICON WAFERS;

EID: 0031237190     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366072     Document Type: Article

References (20)

1. H. A. Szymanski, Raman Spectroscopy, Theory and Practice (Plenum, New York 1967), Vols. 1 and 2.
2. E. M. Anastassakis, in Dynamical Properties of Solids, edited by G. K. Horton, and A. A. Maradudin (North Holland, Amsterdam, 1980).
3. E. Anastassakis and E. Liarokapis, J. Appl. Phys. 62, 3346 (1987).
4. K. Yamazaki, M. Yamada, K. Yamamoto, and K. Abe, Jpn. J. Appl. Phys., Part 1 23, 681 (1984).
5. T. Ito, H. Azuma, and S. Noda, Jpn. J. Appl. Phys., Part 1 33, 171 (1994).
6. S. Nakashima, Y. Inoue, M. Miyauchi, A. Mitsuishi, T. Nishimura, T. Fukumoto, and Y. Akasaka, J. Appl. Phys. 54, 2611 (1983).
7. J. Vanhellemont, I. De Wolf, K. G. F. Janssens, S. Frabboni, R. Balboni, and A. Armigliato, Appl. Surf. Sci. 63, 119 (1993).
8. N. Melanitis and C. Galiotis, Proc. R. Soc. London, Ser. A 440, 379 (1993).
9. M. C. Andrews, R. J. Day, X. Hu, and R. J. Young, Composite Sci. Technol. 48, 255 (1993).
10. X. Yang and R. J. Young, Composites 25, 488 (1994).
11. E. Anastassakis, A. Pinczuk, E. Burstein, F. H. Pollack, and M. Cardona, Solid State Commun. 8, 133 (1970).
12. I. De Wolf, J. Vanhellemont, A. Romano-Rodriguez, H. Norstrom, and H. E. Maes, J. Appl. Phys. 71, 898 (1992).
13. P. Gans and J. B. Gill, Appl. Spectrosc. 31, 451 (1977).
14. J. F. Degregorio, T. E. Furtak, and J. J. Petrovic, J. Appl. Phys. 71, 3524 (1992).
15. K. E. D. Sumanasiri and O. Van der Biest, Scr. Metall. Mater. 30, 79 (1994).
16. H. Sakata, G. Dresselhaus, M. S. Dresselhaus, and M. Endo, J. Appl. Phys. 63, 2769 (1988).
17. R. Loudon, Adv. Phys. 13, 423 (1964).
18. G. Simmons and H. Wang, Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook (MIT, Cambridge, MA, 1971).
19. A. Baruya and W. F. Maddams, Appl. Spectrosc. 32, 563 (1978).
20. MAPLEV© Student Edition (Brooks Cole Publishing, CA, 1981).