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Volumn 6, Issue 2, 1996, Pages 158-172

Review of atomistic simulations of surface diffusion and growth on semiconductors

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DIFFUSION; QUANTUM THEORY; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR GROWTH; SEMICONDUCTOR MATERIALS; SUBSTRATES; SURFACE PROPERTIES; SURFACES;

EID: 0030218605     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/0927-0256(96)00030-4     Document Type: Review
Times cited : (26)

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