Polysilicon sealed vacuum cavities for microelectromechanical systems

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2286-2294

  David Zook, J ^a   Herb, William R ^a   Ahn, Yongchul ^b   Guckel, Henry ^b  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT GAS; ELECTRICAL DRIVES; ELECTRICAL RESISTANCES; HARSH ENVIRONMENT; HIGH TEMPERATURE; MECHANICAL RESONATORS; MICRO BEAMS; MICRO ELECTRO MECHANICAL SYSTEM; POLYSILICON RESONATORS; PRESSURE TRANSMITTERS; Q-VALUES; RESIDUAL PRESSURES; ROOM TEMPERATURE; SILICON-BASED MICROELECTROMECHANICAL SYSTEMS; STRAIN GAUGE; VACUUM CAVITY;

ACOUSTICS; COMPOSITE MICROMECHANICS; GAGES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; SENSORS; VACUUM;

POLYSILICON;

EID: 0000702324     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581762     Document Type: Conference Paper

References (33)

1. H. Guckel and D. W. Burns, Tech. Dig. Int. Electron Devices Meet. 223 (1984).
2. D. W. Burns, Ph.D. thesis, Department of Materials Science, University of Wisconsin, Madison, WI, 1988.
3. J. J. Sniegowski, Ph.D. thesis, Department of Nuclear Engineering and Engineering Physics, University of Wisconsin, Madison, WI, 1989.
4. K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida, and K. Harada, Sens. Actuators 146 (1990).
5. L. Lin, R. T. Howe, and A. P. Pisano, J. Microelectromech. Syst. 7, 286 (1998).
6. X. Jin, I. Ladabaum, and B. T. Khuri-Yakub, J. Microelectromech. Syst. 7, 295 (1998).
7. E. Kalvesten, L. Smith, L. Tenerz, and G. Stemme, Proceedings of the 1998 MEMS Workshop, Heidelberg, pp. 574-579.
8. P. J. French, B. P. van Drieenhuizen, D. Poenar, J. F. L. Goosen, R. Mallee, P. M. Sarro, and R. F. Wolffenbuttel, J. Microelectromech. Syst. 5, 187 (1996).
9. D. W. Burns, J. D. Zook, R. D. Horning, and W. R. Herb, Sens. Actuators A 48, 179 (1995).
10. D. W. Burns, R. D. Horning, W. R. Herb, and J. D. Zook, Sens. Actuators A 53, 249 (1996).
11. W. E. Newell, Science 161, 1320 (1968).
12. R. Legtenberg and H. A. C. Tilmans, Sens. Actuators A 45, 57 (1994).
13. R. A. Buster and N. F. deRooij, Sens. Actuators A 21-23, 323 (1990).
14. K. Kokubun, M. Hirata, M. Ono, H. Murakami, and Y. Toda, J. Vac. Sci. Technol. A 5, 2450 (1987).
15. M. W. Judy and R. T. Howe, Proceedings of the MEMS '93 Workshop, Ft. Lauderdale, pp. 265-271.
16. R. G. Christian, Vacuum 16, 175 (1966).
17. B. S. Berry and W. C. Pritchet, IBM J. Res. Dev. 19, 334 (1975).
18. H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, IEEE Trans. Electron Devices ED-14, 117 (1967).
19. M. Esashi, S. Sugiyama, K. Ikeda, Y. Wang, and H. Miyashita, Proc. IEEE 86, 1627 (1998).
20. T. S. J. Lammerink and W. Wlodarski, Proceedings of the IEEE Conference on Transducers '85, Philadelphia, 1985, pp. 97-100.
21. E. Dieulesaint, D. Royer, and Bonnefoy, 1981 Ultrasonics Symposium (IEEE, New York, 1981), pp. 802-805.
22. J. Bienstman, H. A. C. Tilmans, M, Steyaert, and R. Puers, Proceedings of Transducer '95-Eurosensors IX, Stockholm (IEEE, New York, 1995), pp. 146-149.
23. J. D. Zook, D. W. Burns, W. R. Herb, H. Guckel, J. W. Kang, and Y. C. Ahn, Sens. Actuators A 52, 92 (1996).
24. W. R. Herb, J. D. Zook, M. L. Wilson, and C. J. Bassett, IEEE Topical Meeting on Optical MEMS, 1998, Monterey, CA, pp. 43-45.
25. H. Guckel, M. Nesnidal, J. D. Zook, and D. W. Burns, Proceedings of Transducers '93, Yokohama (Institute of Electrical Engineers, Tokyo, 1993), pp. 686-689.
26. D. W. Burns, W. R. Herb, J. D. Zook, and M. L. Wilson, Sensors and Actuators Workshop, Hilton Head, SC (Transducers Research Foundation, Cleveland Heights, Ohio, 1996), pp. 294-298.
27. K. B. Lee and Y. H. Cho, J. Micromech. Microeng. 6, 426 (1996).
28. R. E. Mihailovich and N. C. MacDonald, Sens. Actuators A 50, 199 (1995).
29. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, and D. Rugar, Solid-State Sensor and Actuator Workshop, Hilton Head, SC (Transducer Research Foundation, Cleveland Heights, Ohio, 1998), pp. 65-70.
30. Y. Jimbo and K. Itao, J. Horolog. Inst. Jpn. 47, 1 (1968) (in Japanese).
31. H. Hosaka, K. Itao, and S. Kuroda, Proceedings of the MEMS Workshop, Oiso, Japan, 1994, pp. 193-198.
32. L. E. Kinsler, A. R. Ferry, A. B. Coppens, and J. V. Sanders, Fundamentals of Acoustics, 3rd ed. (Wiley, New York, 1982), p. 51.
33. In Ref. 32, p. 192.